Symmetric and asymmetric capacitively coupled radio-frequency plasmas in oxygen at 40 Pa, 300 V voltage amplitude and a discharge gap of 40 mm are investigated by means of one-dimensional numerical semi-kinetic fluid modeling on the basis of a simplified reaction scheme including the dominant positive and negative ions, background gas, and electrons. An improved treatment, by accounting for the dependence of ion mobilities on E/N, is compared to the standard approach, based on using zero-field mobility values only. The charged particle dynamics as a result of direct electron impact ionization of oxygen, secondary electron release from the electrodes, the spatial distribution of all involved particles as well as impact of geometry and model modification on ion energies is analyzed and compared to independent simulations and experiments.
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Research Article|
May 08 2013
Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities
Arthur Greb;
Arthur Greb
a)
1York Plasma Institute, Department of Physics,
University of York
, York YO10 5DD, United Kingdom
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Kari Niemi;
Kari Niemi
1York Plasma Institute, Department of Physics,
University of York
, York YO10 5DD, United Kingdom
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Deborah O'Connell;
Deborah O'Connell
1York Plasma Institute, Department of Physics,
University of York
, York YO10 5DD, United Kingdom
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Gerard J. Ennis;
Gerard J. Ennis
2
Intel Ireland Ltd.
, Leixlip, Ireland
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Niall MacGearailt;
Niall MacGearailt
2
Intel Ireland Ltd.
, Leixlip, Ireland
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Timo Gans
Timo Gans
1York Plasma Institute, Department of Physics,
University of York
, York YO10 5DD, United Kingdom
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Phys. Plasmas 20, 053502 (2013)
Article history
Received:
February 27 2013
Accepted:
April 22 2013
Citation
Arthur Greb, Kari Niemi, Deborah O'Connell, Gerard J. Ennis, Niall MacGearailt, Timo Gans; Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities. Phys. Plasmas 1 May 2013; 20 (5): 053502. https://doi.org/10.1063/1.4804280
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