Based on a theoretical argument from fundamental kinetic theory, by way of simple worked examples, and through the use of particle-in-cell simulations of capacitively coupled plasmas, we demonstrate that conventional methods for calculating the momentum transfer collision frequency in low-pressure plasmas can be seriously erroneous. This potentially plays an important and previously unconsidered role in many low-pressure discharges, and at least in part provides a possible explanation for anomalous behaviour often encountered in these plasmas.
REFERENCES
1.
M. A.
Lieberman
and A. J.
Lichtenberg
, Principles of Plasma Discharges and Materials Processing
(John Wiley & Sons
, New Jersey
, 2005
).2.
P.
Chabert
and N.
Braithwaite
, Physics of Radio-Frequency Plasmas
(University Press
, Cambridge
, 2011
).3.
F. F.
Chen
, Introduction to Plasma Physics and Controlled Fusion
(Plenum Press
, New York
, 1984
).4.
V. I.
Kolobov
and D. J.
Economou
, Plasma Sources Sci. Technol.
6
, R1
(1997
).5.
O. A.
Popov
and V. A.
Godyak
, J. Appl. Phys.
57
, 53
(1985
).6.
V. A.
Godyak
and R. B.
Piejak
, Phys. Rev. Lett.
65
, 996
(1990
).7.
V. A.
Godyak
, R. B.
Piejak
, B. M.
Alexandrovich
, and V. I.
Kolobov
, Phys. Rev. Lett.
80
, 3264
(1998
).8.
F. F.
Chen
and R. W.
Boswell
, IEEE Trans. Plasma Sci.
25
, 1245
(1997
).9.
G.
Chen
, A. V.
Arefiev
, R. D.
Bengtson
, B. N.
Breizman
, C. A.
Lee
, and L. L.
Raja
, Phys. Plasmas
13
, 123507
(2006
).10.
C. A.
Lee
, G.
Chen
, A. V.
Arefiev
, R. D.
Bengston
, and B. N.
Breizman
, Phys. Plasmas
18
, 013501
(2011
).11.
N. B.
Meezan
, W. A.
Hargus
, Jr., and M. A.
Cappelli
, Phys. Rev. E
63
, 026410
(2001
).12.
G. J. M.
Hagelaar
, J.
Bareilles
, L.
Garrigues
, and J. P.
Boeuf
, J. Appl. Phys.
93
, 67
(2003
).13.
R. E.
Robson
, Introductory Transport Theory for Charged Particles in Gases
(World Scientific Publishing
, Singapore
, 2006
).14.
K.
Takahashi
, C.
Charles
, and R. W.
Boswell
, Phys. Plasmas
14
, 114503
(2007
).15.
J. L.
Pack
, R. E.
Voshall
, A. V.
Phelps
, and L. E.
Kline
, J. Appl. Phys.
71
, 5363
(1992
).16.
G. J. M.
Hagelaar
and L. C.
Pitchford
, Plasma Sources Sci. Technol.
14
, 722
(2005
).17.
H.
Margenau
, Phys. Rev.
69
, 508
(1946
).18.
G. G.
Lister
, Y. M.
Li
, and V. A.
Godyak
, J. Appl. Phys.
79
, 8993
(1996
).19.
A. V.
Phelps
and L. C.
Pitchford
, Phys. Rev. A
31
, 2932
(1985
).20.
R. D.
White
, R. E.
Robson
, B.
Schmidt
, and M. A.
Morrison
, J. Phys. D: Appl. Phys.
36
, 3125
(2003
).21.
T.
Lafleur
, R. W.
Boswell
, and J. P.
Booth
, Appl. Phys. Lett.
100
, 194101
(2012
).22.
T.
Lafleur
and J. P.
Booth
, J. Phys. D: Appl. Phys.
45
, 395203
(2012
).23.
M. M.
Turner
, A.
Derzsi
, Z.
Donkó
, D.
Eremin
, S. J.
Kelly
, T.
Lafleur
, and T.
Mussenbrock
, Phys. Plasmas
20
, 013507
(2013
).24.
P. A.
Delattre
, T.
Lafleur
, E. V.
Johnson
, and J. P.
Booth
, J. Phys. D: Appl. Phys.
46
, 235201
(2013
).25.
V. A.
Godyak
, R. B.
Piejak
, and B. M.
Alexandrovich
, Phys. Rev. Lett.
68
, 40
(1992
).26.
V.
Vahedi
, C. K.
Birdsall
, M. A.
Lieberman
, G.
DiPeso
, and T. D.
Rognlien
, Plasma Sources Sci. Technol.
2
, 273
(1993
).27.
M.
Surendra
and M.
Dalvie
, Phys. Rev. E
48
, 3914
(1993
).28.
D. M.
Goebel
and I.
Katz
, Fundamentals of Electric Propulsion: Ion and Hall Thrusters
(John Wiley & Sons
, New Jersey
, 2008
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
You do not currently have access to this content.
