The general solution to the electrostatic and magnetic fields is derived with respect to the boundary conditions of a coaxial helicon plasma source. The electric field contours suggest that a simple antenna design can ionize the gas in a coaxial configuration. In addition, the power deposition as a function of excitation frequency is derived. The solution is validated by comparison with the standard cylindrical helicon plasma source. Further, a parametric study of source length, channel radius, channel width, and antenna excitation frequency are presented. This study suggests that it is possible to create a helicon plasma source with a coaxial configuration.
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2006
American Institute of Physics
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