The characteristics of a microwave surface-wave sustained plasma operated at atmospheric pressure in an open-ended dielectric tube are investigated theoretically as a first step in the development of a self-consistent model for these discharges. The plasma column is sustained in flowing argon. A surface-wave discharge that fills the whole radial cross section of the discharge tube is considered. With experimental electron temperature profiles [García et al., Spectrochim. Acta, Part B 55, 1733 (2000)] the numerical model is used to test the validity of the different approximations and to study the influence of the different kinetic processes and power loss mechanisms on the discharge.
REFERENCES
1.
C. M.
Ferreira
, J. Phys. D
14
, 1811
(1981
).2.
E.
Tatarova
, F. M.
Dias
, C. M.
Ferreira
, V.
Guerra
, J.
Loureiro
, E.
Stoykova
, I.
Ghanashev
, and I.
Zhelyazkov
, J. Phys. D
30
, 2663
(1997
).3.
M. J.
Pinheiro
, G.
Gousset
, A.
Granier
, and C. M.
Ferreira
, Plasma Sources Sci. Technol.
7
, 524
(1998
).4.
E.
Tatarova
, F. M.
Dias
, C. M.
Ferreira
, and A.
Ricard
, J. Appl. Phys.
85
, 49
(1999
).5.
A.
Granier
, S.
Pasquiers
, C.
Boisse-Laporte
, R.
Dauchicourt
, P.
Leprince
, and J.
Marec
, J. Phys. D
22
, 1487
(1989
).6.
K.
Makasheva
and A.
Shivarova
, IEEE Trans. Plasma Sci.
30
, 384
(2002
).7.
N. A.
Azarenkov
, I. B.
Denysenko
, and A. V.
Gapon
, Phys. Plasmas
8
, 1467
(2001
).8.
M.
Böke
, G.
Himmel
, I.
Koleva
, and M.
Schlüter
, J. Phys. D
32
, 2426
(1999
).9.
F. J.
Gordillo-Vázquez
and J.
Cotrino
, J. Appl. Phys.
78
, 4360
(1995
).10.
H.
Nowakowska
, Z.
Zakrzewski
, M.
Moisan
, and M.
Lubanski
, J. Phys. D
31
, 1422
(1998
).11.
M. S.
Benilov
and G. V.
Naidis
, IEEE Trans. Plasma Sci.
31
, 488
(2003
).12.
H.
Nowakowska
, Z.
Zakrzewski
, and M.
Moisan
, J. Phys. D
34
, 1474
(2001
).13.
14.
S. Y.
Moon
, W.
Choe
, H. S.
Uhm
, Y. S.
Hwang
, and J. J.
Choi
, Phys. Plasmas
9
, 4045
(2002
).15.
E. A. H.
Timmermans
, M. J.
van de Sande
, and J. J. A. M.
van der Mullen
, Plasma Sources Sci. Technol.
12
, 324
(2003
).16.
J. D.
Yan
, C. F.
Pau
, S. R.
Wylie
, and M. T. C.
Fang
, J. Phys. D
35
, 2594
(2002
).17.
W.
Zhao
, K.
Tian
, D.
Liu
, and G.
Zhang
, J. Phys. D
35
, p. 2815
(2002
).18.
Y.
Kabouzi
, M. D.
Calzada
, M.
Moisan
, K. C.
Tran
, and C.
Trassy
, J. Appl. Phys.
91
, 1008
(2002
).19.
M. C.
García
, A.
Rodero
, A.
Sola
, and A.
Gamero
, Spectrochim. Acta, Part B
55
, 1733
(2000
).20.
M. D.
Calzada
, M. C.
García
, J. M.
Luque
, and I.
Santiago
, J. Appl. Phys.
92
, 2269
(2002
).21.
E.
Benova
, Ts.
Petrova
, A.
Blagoev
, and I.
Zhelyazkov
, J. Appl. Phys.
84
, 147
(1998
).22.
Ts.
Petrova
, E.
Benova
, G.
Petrov
, and I.
Zhelyazkov
, Phys. Rev. E
60
, 875
(1999
).23.
J.
Henriques
, E.
Tatarova
, F. M.
Dias
, and C. M.
Ferreira
, J. Appl. Phys.
90
, 4921
(2001
).24.
J.
Vlcek
, J. Phys. D
22
, 623
(1989
).25.
A.
Bogaerts
, R.
Gijbels
, and J.
Vlcek
, J. Appl. Phys.
84
, 121
(1998
).26.
A.
Bultel
, B.
van Ootegem
, A.
Bourdon
, and P.
Vervisch
, Phys. Rev. E
65
, 046406
(2002
).27.
V.E.
Golant
, A.P.
Zhilinsky
, I.E.
Sakharov
, and S.C.
Brown
, Fundamentals of Plasma Physics (Wiley, New York, 1980
).28.
V.M.
Lelevkin
, D.K.
Otorbaev
, and D.C.
Schram
, Physics of Non Equilibrium Plasmas (North-Holland, Amsterdam, 1992
).29.
M.
Mitchner
and C.
Kruger
, Partially Ionized Gases (Wiley, New York, 1973
).30.
C. G.
Braun
and J. A.
Kunc
, Phys. Fluids
31
, 671
(1988
).31.
T.
Holstein
, Phys. Rev.
83
, 1159
(1951
).32.
A.
Kimura
, H.
Kobayashi
, M.
Nishida
, and P.
Valentin
, J. Quant. Spectrosc. Radiat. Transf.
34
, 189
(1985
).33.
W. L.
Wiese
, J. W.
Brault
, K.
Danzmann
, V.
Helbig
, and M.
Kock
, Phys. Rev. A
39
, 2461
(1989
).34.
C.
Duzy
and H. A.
Hyman
, Phys. Rev. A
22
, 1878
(1980
).35.
36.
H.
Nowakowska
, Z.
Zakrzewski
, and M.
Moisan
, J. Phys. D
34
, 1474
(2001
).37.
S.
Neeser
, T.
Kunz
, and H.
Langhoff
, J. Phys. D
30
, 1489
(1997
).38.
U. M.
Kelkar
, M. H.
Gordon
, L. A.
Roe
, and Y.
Li
, J. Vac. Sci. Technol. A
17
, 125
(1999
).
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