Thin film lubrication theory has been widely used to model multi-scale fluid phenomena. Variations of the same have also found application in fluid-based manufacturing process steps for micro- and nano-scale devices over large areas where a natural disparity in length scales exists. Here, a novel inkjet material deposition approach has been enabled by an enhanced thin film lubrication theory that accounts for nano-scale substrate parasitics. This approach includes fluid interactions with a thin flexible superstrate towards a new process called Jet and Coat of Thin-films (JCT). Numerical solutions of the model have been verified, and also validated against controlled experiments of polymer film deposition with good agreement. Understanding gleaned from the experimentally validated model has then been used to facilitate JCT process synthesis resulting in substantial reduction in the influence of parasitics and a concomitant improvement in the film thickness uniformity. Polymer films ranging from 20 to 500 nm mean thickness have been demonstrated with standard deviation of less than 2% of the mean film thickness. The JCT process offers advantages over spin coating which is not compatible with roll-to-roll processing and large area processing for displays. It also improves over techniques such as knife edge coating, slot die coating, as they are limited in the range of thicknesses of films that can be deposited without compromising uniformity.
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Metrosol, Inc., now acquired by Jordan Valley Semiconductor, Inc., 3913 Todd Lane, Suite 106, Austin (as of June 2013), the same product is no longer available, see http://www.jpkummer.com/metrology.php?p=metrosol for information regarding a similar product.
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