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Journal Articles

Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?

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Anthony Ayari, Pascal Vincent, Sorin Perisanu, Philippe Poncharal, Stephen T. Purcell
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 053201 (2024)
https://doi.org/10.1116/6.0003828
Published: August 2024
View article titled, Is the linear relationship between the slope and intercept observed in field emission S-K plots an artifact?
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Journal Articles

Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications

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A. S. Stodolna, T. W. Mechielsen, P. van der Walle, C. Meekes, H. Lensen
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 052601 (2024)
https://doi.org/10.1116/6.0003701
Published: August 2024
View article titled, Novel low-temperature and high-flux hydrogen plasma source for extreme-ultraviolet lithography applications
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Journal Articles

Future of plasma etching for microelectronics: Challenges and opportunities

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Gottlieb S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce, Jane P. Chang, Jessica C. DeMott, Vincent M. Donnelly, Rémi Dussart, Andreas Fischer, Richard A. Gottscho, Satoshi Hamaguchi, Masanobu Honda, Masaru Hori, Kenji Ishikawa, Steven G. Jaloviar, Keren J. Kanarik, Kazuhiro Karahashi, Akiteru Ko, Hiten Kothari, Nobuyuki Kuboi, Mark J. Kushner, Thorsten Lill, Pingshan Luan, Ali Mesbah, Eric Miller, Shoubhanik Nath, Yoshinobu Ohya, Mitsuhiro Omura, Chanhoon Park, John Poulose, Shahid Rauf, Makoto Sekine, Taylor G. Smith, Nathan Stafford, Theo Standaert, Peter L. G. Ventzek
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 041501 (2024)
https://doi.org/10.1116/6.0003579
Published: June 2024
View article titled, Future of plasma etching for microelectronics: Challenges and opportunities
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Journal Articles

Science challenges and research opportunities for plasma applications in microelectronics

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David B. Graves, Catherine B. Labelle, Mark J. Kushner, Eray S. Aydil, Vincent M. Donnelly, Jane P. Chang, Peter Mayer, Lawrence Overzet, Steven Shannon, Shahid Rauf, David N. Ruzic
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 042202 (2024)
https://doi.org/10.1116/6.0003531
Published: June 2024
View article titled, Science challenges and research opportunities for plasma applications in microelectronics
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Journal Articles

Monitoring of rapid thermal anneal with secondary ion mass spectrometry

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Z. X. Jiang, A. Ravi, T. Breeden, K. Khmelnitskiy, A. Duncan, D. Huynh, S. Butler, B. Granados, D. Acker, J. Luebbe, D. Sieloff, S. Bolton, G. Prieto
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034007 (2024)
https://doi.org/10.1116/6.0003599
Published: May 2024
View article titled, Monitoring of rapid thermal anneal with secondary ion mass spectrometry
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Journal Articles

Novel surface wave technique for moderate-pressure plasma measurements

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Shadhin Hussain, Matthew Goeckner
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 034005 (2024)
https://doi.org/10.1116/6.0003331
Published: April 2024
View article titled, Novel surface wave technique for moderate-pressure plasma measurements
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Journal Articles

Planar microcoil arrays for in vitro cellular-level micromagnetic activation of neurons

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Renata Saha, Onri J. Benally, Sadegh Faramarzi, Robert Bloom, Kai Wu, Denis Tonini, Maple Shiao, Susan A. Keirstead, Walter C. Low, Theoden I. Netoff, Jian-Ping Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033001 (2024)
https://doi.org/10.1116/6.0003362
Published: April 2024
View article titled, Planar microcoil arrays for <em>in vitro</em> cellular-level micromagnetic activation of neurons
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Includes: Supplementary data
Journal Articles

New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition

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Emilia W. Hirsch, Dominik Metzler, Peng Wang
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 032208 (2024)
https://doi.org/10.1116/6.0003464
Published: April 2024
View article titled, New approach of local critical dimension uniformity improvement for via/contact hole etch with direct current superposition
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Journal Articles

Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth

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Mingyu Yu, Jiayang Wang, Sahani A. Iddawela, Molly McDonough, Jessica L. Thompson, Susan B. Sinnott, Danielle Reifsnyder Hickey, Stephanie Law
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 033201 (2024)
https://doi.org/10.1116/6.0003470
Published: March 2024
View article titled, Treatment and aging studies of GaAs(111)B substrates for van der Waals chalcogenide film growth
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Includes: Supplementary data
Journal Articles

High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3

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Hsiao-Hsuan Wan, Haochen Zhu, Chao-Ching Chiang, Jian-Sian Li, Fan Ren, Cheng-Tse Tsai, Yu-Te Liao, Dan Neal, Josephine F. Esquivel-Upshaw, Stephen J. Pearton
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 023202 (2024)
https://doi.org/10.1116/6.0003370
Published: February 2024
View article titled, High sensitivity saliva-based biosensor in detection of breast cancer biomarkers: HER2 and CA15-3
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Journal Articles

Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures

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Paul Smith, Sam Lodge, Andrew Chew
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 42, 014202 (2024)
https://doi.org/10.1116/6.0003152
Published: January 2024
View article titled, Evaluation of the pumping performance of combinations of Ti–Zr–V–Hf alloy nonevaporable getter coatings with different morphologies, activation protocols controlled at cryogenic temperatures
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Journal Articles

Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics

Yuan Xiao Ma, Hui Su, Wing Man Tang, Pui To Lai
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 060804 (2023)
https://doi.org/10.1116/5.0156557
Published: November 2023
View article titled, Review on remote phonon scattering in transistors with metal-oxide-semiconductor structures adopting high-k gate dielectrics
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Journal Articles

III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth

Russell D. Dupuis
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 060803 (2023)
https://doi.org/10.1116/6.0003062
Published: October 2023
View article titled, III–V semiconductor devices grown by metalorganic chemical vapor deposition—The development of the Swiss Army Knife for semiconductor epitaxial growth
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Journal Articles

Atomic-scale imaging and spectroscopy via scanning probe microscopy: An overview

Saima A. Sumaiya, Mehmet Z. Baykara
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 060802 (2023)
https://doi.org/10.1116/6.0002889
Published: October 2023
View article titled, Atomic-scale imaging and spectroscopy via scanning probe microscopy: An overview
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Journal Articles

X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline

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Kanta Yamamoto, Yuichi Utsumi, Ikuya Sakurai, Ikuo Okada, Kenji Hanada, Hidehiro Ishizawa, Masahiro Takeo, Taki Watanabe, Sho Amano, Satoru Suzuki, Koji Sumitomo, Akinobu Yamaguchi
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062602 (2023)
https://doi.org/10.1116/6.0003021
Published: October 2023
View article titled, X-ray multi-scale microfabrication system and x-ray imaging evaluation system all in one beamline
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Journal Articles

Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging

Achim Nadzeyka, Torsten Richter, Paul Mazarov, Fabian Meyer, Alexander Ost, Lars Bruchhaus
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 062802 (2023)
https://doi.org/10.1116/6.0002918
Published: October 2023
View article titled, Focused ion beams from GaBiLi liquid metal alloy ion sources for nanofabrication and ion imaging
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Journal Articles

Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments

Soon-Won Jung, Min Hyuk Chang, Kyeong-Joon Jo, Mi-Hee Jung, Seung-Yun Lee
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 052201 (2023)
https://doi.org/10.1116/6.0002631
Published: July 2023
View article titled, Electrochemical bulk and film-type oxygen sensors: Strategies for detecting extremely low concentration in hydrogen environments
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Journal Articles

Field emission: Applying the “magic emitter” validity test to a recent paper, and related research-literature integrity issues

Richard G. Forbes
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042807 (2023)
https://doi.org/10.1116/6.0002739
Published: July 2023
View article titled, Field emission: Applying the “magic emitter” validity test to a recent paper, and related research-literature integrity issues
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Journal Articles

Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing

Nicholas Nunn, Sergey Milikisiyants, Marco D. Torelli, Richard Monge, Tom Delord, Alexander I. Shames, Carlos A. Meriles, Ashok Ajoy, Alex I. Smirnov, Olga A. Shenderova
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 042206 (2023)
https://doi.org/10.1116/6.0002797
Published: June 2023
View article titled, Optical and electronic spin properties of fluorescent micro- and nanodiamonds upon prolonged ultrahigh-temperature annealing
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Includes: Supplementary data
Journal Articles

Rapid detection of radiation susceptible regions in electronics

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Sergei P. Stepanoff, Aman Haque, Fan Ren, Stephen Pearton, Douglas E. Wolfe
Journal: Journal of Vacuum Science & Technology B
J. Vac. Sci. Technol. B 41, 044005 (2023)
https://doi.org/10.1116/6.0002689
Published: June 2023
View article titled, Rapid detection of radiation susceptible regions in electronics
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