Absolute cross sections are measured for electron impact ionization and dissociative ionization of SiF2 from threshold to 200 eV. A fast (3 keV) neutral beam of SiF2 is formed by charge transfer neutralization of SiF+2 with Xe; it is primarily in the ground electronic state with about 10% in the metastable first excited electronic state (ã 3B1). The absolute cross section for ionization of the ground state by 70 eV electrons to the parent SiF+2 is 1.38±0.18 Å2. Formation of SiF+ is the major process with a cross section at 70 eV of 2.32±0.30 Å2. The cross section at 70 eV for formation of the Si fragment ion is 0.48±0.08 Å2. Ion pair production contributes a significant fraction of the positively charged fragment ions.
REFERENCES
1.
T. R.
Hayes
, R. C.
Wetzel
, E. A.
Baiocchi
, and R. S.
Freund
, J. Chem. Phys.
88
, 823
(1988
).2.
T. R.
Hayes
, R. J.
Shul
, F. A.
Baiocchi
, R. C.
Wetzel
, and R. S.
Freund
, J. Chem. Phys.
89
, xxxx
(1988
).3.
4.
R. S. Freund, in Swarm Studies and Inelastic Electron‐Molecule Collisions, edited by L. C. Pitchford, B. V. McKoy, A. Chutjian, and S. Trajmar (Springer, New York, 1987).
5.
6.
See, for example, D. L. Flamm, V. M. Donnelly, and D. E. Ibbotson, in VLSI Electronics: Microstructure Science, edited by N. G. Einspruch and D. M. Brown (Academic, Orlando, 1984), Chap. 8.
7.
8.
J. A.
Dagata
, D. W.
Squire
, C. S.
Dulcey
, D. S. Y.
Hsu
, and M. C.
Lin
, J. Vac. Sci. Technol. B
5
, 1495
(1987
).9.
R. C.
Wetzel
, F. A.
Baiocchi
, T. R.
Hayes
, and R. S.
Freund
, Phys. Rev. A
35
, 559
(1987
).10.
11.
12.
M. E.
Colvin
, R. S.
Grev
, H. F.
Schaefer
, III, J.
Bicerano
, Chem. Phys. Lett.
99
, 399
(1983
).13.
14.
15.
A. D. Walsh, J. Chem. Soc. 1953, 2266.
16.
17.
K. P. Huber and G. H. Herzberg, Molecular Spectra and Molecular Structure (Van Nostrand Reinhold, New York, 1979).
18.
S. M. Younger and T. D. Märk, in Electron Impact Ionization, edited by T. D. Mark and G. H. Dunn (Springer, New York, 1985), pp. 24–41.
19.
F. Houle (private communication).
This content is only available via PDF.
© 1988 American Institute of Physics.
1988
American Institute of Physics
You do not currently have access to this content.
