The kinetics of surface photochemistry in adsorbed mixtures of titanium tetrachloride (TiCl4) and trimethylaluminum [Al2(CH3)6] is studied by UV‐laser‐induced photodeposition. Although both TiCl4 and Al2(CH3)6 individually undergo adsorbed‐phase photoreactions, a new photoreaction channel is observed when they are simultaneously present. Pressure dependencies of the reaction rate indicate that the new channel is a two‐component photoreaction in the adsorbed mixture. The data can be qualitatively understood in terms of a Langmuir–Hinshelwood mechanism in conjunction with competitive adsorption of the two components.

1.
Laser‐Controlled Chemical Processing of Surfaces, edited by A. W. Johnson, D. J. Ehrlich and H. R. Schlossberg (Elsevier, New York, in press).
2.
Surface Studies with Lasers, edited by F. R. Aussenegg, A. Leitner, and M. E. Lippitsch (Springer, Berlin, 1983).
3.
R. M.
Osgood
,
Annu. Rev. Chem. Phys.
34
,
77
(
1983
).
4.
D. J.
Ehrlich
and
J. Y.
Tsao
,
J. Vac. Sci. Technol. B
1
,
969
(
1983
).
5.
T. J.
Chuang
,
Surf. Sci. Rep.
3
,
1
(
1983
).
6.
D. J. Ehrlich and J. Y. Tsao, in VLSI Electronics: Microstructure Science, edited by N. G. Einspruch (Academic, New York, 1984), Vol. 7, pp. 129–163.
7.
G. A. Somorjai, Chemistry in Two Dimensions: Surfaces (Cornell University, Ithaca, 1981).
8.
J. K. Sass and H. Gerischer, in Photoemission and the Electronic Properties of Surfaces, edited by B. Feuerbacher, B. Fitton, and R. F. Willis (Wiley, Chichester, 1978), pp. 469–500.
9.
F. A.
Houle
,
Chem. Phys. Lett.
95
,
5
(
1983
).
10.
The Faraday Division of the Chemical Society, Photoeffects in Adsorbed Species, Faraday Discussions of the Chemical Society No. 58 (The Chemical Society, London, 1974).
11.
T. J.
Chuang
,
J. Chem. Phys.
76
,
3828
(
1982
).
12.
D. J. Ehrlich and J. Y. Tsao, in Ref. 2, pp. 171–176.
13.
N.
Bottka
,
P. J.
Walsh
, and
R. Z.
Dalbey
,
J. Appl. Phys.
54
,
1104
(
1983
).
14.
D. J.
Ehrlich
,
R. M.
Osgood
, Jr.
, and
T. F.
Deutsch
,
Appl. Phys. Lett.
38
,
946
(
1981
).
15.
W. Bach and H. D. Breuer, in Ref. 10, pp. 237–243.
16.
D. J. Ehrlich and J. Y. Tsao (unpublished).
17.
J. Y. Tsao and D. J. Ehrlich, in Ref. 1.
18.
T. H.
Wood
,
J. C.
White
, and
B. A.
Thacker
,
Appl. Phys. Lett.
42
,
408
(
1983
).
19.
J. Y.
Tsao
,
R. A.
Becker
,
D. J.
Ehrlich
, and
F. J.
Leonberger
,
Appl. Phys. Lett.
42
,
559
(
1983
).
20.
D. J.
Ehrlich
,
R. M.
Osgood
, Jr.
, and
T. F.
Deutsch
,
J. Vac. Sci. Technol.
21
,
23
(
1982
).
21.
Stereoregular Polymers and Stereospecific Polymerizations, edited by G. Natta and F. Dannusso (Pergamon, Oxford, 1967), Vols. 1 and 2;
J. Boor, Jr., Ziegler‐Natta Catalysts and Polymerization (Academic, New York, 1979).
22.
R. B. Seymour, Introduction to Polymer Chemistry (McGraw‐Hill, New York, 1971).
23.
G.
Natta
,
Sci. Am.
205
,
33
(
1961
).
24.
K. J. Laidler, Chemical Kinetics (McGraw‐Hill, New York, 1965).
25.
M.
Lax
,
J. Appl. Phys.
48
,
3919
(
1977
).
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