In this paper, we investigate the substrate effect in graphene temperature sensors. Recently, there have been many research studies done on temperature sensors using the nanofabrication technique. However, the sensitivity and response time need to be improved. In this study, we propose a new type of temperature sensor that consists of graphene and Anodic Aluminum Oxide (AAO). In this device, graphene and AAO are used as the sensing material and the substrate, respectively. We characterize the sensitivity and the response time using the experimental results and simulation data. The real-time resistance change of graphene is monitored depending on the temperature, and the response time is also analyzed by COMSOL Multiphysics. To confirm the porous substrate effect, we compare the device performance of the AAO substrate to the performance of the glass substrate. From these results, the suspended graphene on the AAO substrate shows about two times higher sensitivity and a much faster response time than the glass substrate.
REFERENCES
1.
J. M. S.
Pearce
, “A brief history of the clinical thermometer
,” QJM
95
, 251
(2002
).2.
H.
Rodríguez
, M.
Williams
, J. S.
Wilkes
, and R. D.
Rogers
, “Ionic liquids for liquid-in-glass thermometers
,” Green Chem.
10
, 501
(2008
).3.
M.
Harada
, “Minamata disease: Methylmercury poisoning in Japan caused by environmental pollution
,” Crit. Rev. Toxicol.
25
, 1
(1995
).4.
G.
Bosson
, F.
Gutmann
, and L. M.
Simmons
, “A relationship between resistance and temperature of thermistors
,” J. Appl. Phys.
21
, 1267
(1950
).5.
Y.
Zhu
, S.
Murali
, W.
Cai
, X.
Li
, J. W.
Suk
, J. R.
Potts
, and R. S.
Ruoff
, “Graphene and graphene oxide: Synthesis, properties, and applications
,” Adv. Mater.
22
, 3906
(2010
).6.
X.
Li
, H.
Zhu
, K.
Wang
, A.
Cao
, J.
Wei
, C.
Li
, Y.
Jia
, Z.
Li
, X.
Li
, and D.
Wu
, “Graphene-on-silicon Schottky junction solar cells
,” Adv. Mater.
22
, 2743
(2010
).7.
J.
Kwon
and J.
Kim
, “Fabrication and properties of pn diodes with hybrid 2D layers: Graphene/MoS2
,” Mater. Express
8
, 299
(2018
).8.
J.
Kim
, S.
Ganorkar
, Y.-H.
Kim
, and S.-I.
Kim
, “Graphene oxide hole injection layer for high-efficiency polymer light-emitting diodes by using electrophoretic deposition and electrical reduction
,” Carbon
94
, 633
(2015
).9.
J.
Kim
, Q.
Liu
, and T.
Cui
, “Solution-gated ion-sensitive field effect transistor with polymer selective membrane for nitrate detection
,” in International Mechanical Engineering Congress & Exposition
, 2018
, V002T02A089.10.
J.
Kim
, L.
Wang
, and T.
Cui
, “Graphene based ultra sensitive ion sensor for phosphate detection
,” in Proceeding of MicroTAS
(Chemical and Biological Microsystems Society
, 2017
), Vol. 21, p. 473
.11.
J.
Kim
, L.
Wang
, T.
Bourouina
, and T.
Cui
, “Ion sensitive field effect transistor based on graphene and ionophore hybrid membrane for phosphate detection
,” Microsyst. Technol.
25
, 3357
(2018
).12.
L.
Wang
, J.
Kim
, and T.
Cui
, “Self-assembled graphene and copper nanoparticles composite sensor for nitrate determination
,” Microsyst. Technol.
24
, 3623
(2018
).13.
Z.
Qian
, Y.
Hui
, F.
Liu
, S.
Kang
, S.
Kar
, and M.
Rinaldi
, “Graphene–aluminum nitride NEMS resonant infrared detector
,” Microsyst. Nanoeng.
2
, 16026
(2016
).14.
J.
Kim
and T.
Cui
, “Fabrication of suspended graphene temperature sensors using anodic aluminum oxide
,” in Proceeding of MicroTAS
(Chemical and Biological Microsystems Society
, 2018
), Vol. 22, p. 798
.15.
J.
Kim
, S.
Ganorkar
, J.
Choi
, Y.-H.
Kim
, and S.-I.
Kim
, “Fabrication of well-ordered, anodic aluminum oxide membrane using hybrid anodization
,” J. Nanosci. Nanotechnol.
17
, 761
(2017
).16.
V.
Skákalová
, A. B.
Kaiser
, J. S.
Yoo
, D.
Obergfell
, and S.
Roth
, “Correlation between resistance fluctuations and temperature dependence of conductivity in graphene
,” Phys. Rev. B
80
, 153404
(2009
).17.
X.-Y.
Fang
, X.-X.
Yu
, H.-M.
Zheng
, H.-B.
Jin
, L.
Wang
, and M.-S.
Cao
, “Temperature- and thickness-dependent electrical conductivity of few-layer graphene and graphene nanosheets
,” Phys. Lett. A
379
, 2245
(2015
).18.
D.
Yoon
, Y.-W.
Son
, and H.
Cheong
, “Negative thermal expansion coefficient of graphene measured by Raman spectroscopy
,” Nano Lett.
11
, 3227
(2011
).19.
N.
Mounet
and N.
Marzari
, “First-principles determination of the structural, vibrational and thermodynamic properties of diamond, graphite, and derivatives
,” Phys. Rev. B
71
, 205214
(2005
).20.
W.
Gao
and R.
Huang
, “Thermomechanics of monolayer graphene: Rippling, thermal expansion and elasticity
,” J. Mech. Phys. Solids
66
, 42
(2014
).21.
P. L.
de Andres
, F.
Guinea
, and M. I.
Katsnelson
, “Bending modes, anharmonic effects, and thermal expansion coefficient in single-layer and multilayer graphene
,” Phys. Rev. B
86
, 144103
(2012
).22.
U.
Sassi
, R.
Parret
, S.
Nanot
, M.
Bruna
, S.
Borini
, D.
De Fazio
, Z.
Zhao
, E.
Lidorikis
, F. H. L.
Koppens
, A. C.
Ferrari
, and A.
Colli
, “Graphene-based mid-infrared room-temperature pyroelectric bolometers with ultrahigh temperature coefficient of resistance
,” Nat. Commun.
8
, 14311
(2017
).23.
Y.
Ahn
, J.
Kim
, S.
Ganorkar
, Y.-H.
Kim
, and S.-I.
Kim
, “Thermal annealing of graphene to remove polymer residues
,” Mater. Express
6
, 69
(2016
).24.
T.-H.
Han
, Y.
Lee
, M.-R.
Choi
, S.-H.
Woo
, S.-H.
Bae
, B. H.
Hong
, J.-H.
Ahn
, and T.-W.
Lee
, “Extremely efficient flexible organic light-emitting diodes with modified graphene anode
,” Nat. Photonics
6
, 105
(2012
).25.
S.
Shin
, J.
Kim
, Y.-H.
Kim
, and S.-I.
Kim
, “Enhanced performance of organic light-emitting diodes by using hybrid anodes composed of graphene and conducting polymer
,” Curr. Appl. Phys.
13
, S144
(2013
).26.
I.
Alessandri
and J. R.
Lombardi
, “Enhanced Raman scattering with dielectrics
,” Chem. Rev.
116
, 14921
(2016
).27.
P.
Sahatiya
, S. K.
Puttapati
, V. V. S. S.
Srikanth
, and S.
Badhulika
, “Graphene-based wearable temperature sensor and infrared photodetector on a flexible polyimide substrate
,” Flexible Printed Electron.
1
, 025006
(2016
).28.
B.
Abad
, J.
Maiz
, and M.
Martin-Gonzalez
, “Rules to determine thermal conductivity and density of anodic aluminum oxide (AAO) membranes
,” J. Phys. Chem. C
120
, 5361
(2016
).© 2020 Author(s).
2020
Author(s)
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