We determine the atomic structure of the (111) surface of an epitaxial ceria film using low-energy electron diffraction (LEED). The 3-fold-symmetric LEED patterns are consistent with a bulk-like termination of the (111) surface. By comparing the experimental dependence of diffraction intensity on electron energy (LEED-I(V) data) with simulations of dynamic scattering from different surface structures, we find that the CeO2(111) surface is terminated by a plane of oxygen atoms. We also find that the bond lengths in the top few surface layers of CeO2(111) are mostly undistorted from their bulk values, in general agreement with theoretical predictions. However, the topmost oxygen layer is further from the underlying cerium layer than the true bulk termination, an expansion that differs from theoretical predictions.

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