We report a study of the adsorption of CF4 on graphite preplated with a monolayer of CF3Cl, using infrared reflection absorption spectroscopy combined with ellipsometry. The saturated vapor pressure of CF3Cl is nearly 3 orders of magnitude smaller than that of CF4 at the same temperature, so the main control variables are the temperature and the pressure (or chemical potential) of CF4, together with the initial coverage of CF3Cl. The temperature range covered is 60–105 K. We find that, if the initial monolayer of CF3Cl is liquid, CF4 continuously displaces CF3Cl by substitution in the monolayer. If the initial monolayer of CF3Cl is solid, due to either lower temperature or compression, CF4 condenses as a second layer on the top of the CF3Cl layer, with only slight mixing with the original layer. This behavior persists to multiple layers of CF4.

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