The reaction of O2 with Si(111)-(7×7) has been studied by electron energy-loss spectroscopy at 82K. In addition to the losses due to Si–O–Si configurations, we observed two Si–O stretch modes depending on the coverage. A 146-meV peak appears at the initial reaction stage and was ascribed to a metastable product with one oxygen atom bonding on top of Si adatom and the other inserted into the backbond. The initial product is further oxidized to produce the second Si–O stretch peak at 150meV. The secondary product was partially substituted with isotopes and analyzed with a simple model of coupled oscillators. The vibrational spectra reflect dynamical couplings between the isotopes, which is consistent with those predicted from the tetrahedral SiO4 structure with one on top and three inserted oxygen atoms.

1.
J.
Dąbrowski
and
H.-J.
Müssig
,
Silicon Surfaces and Formation of Interfaces
(
World Scientific
, Singapore,
1999
).
2.
H.
Ibach
,
H. D.
Bruchmann
, and
H.
Wagner
,
Appl. Phys. A: Solids Surf.
29
,
113
(
1982
).
3.
K.
Edamoto
,
Y.
Kubota
,
H.
Kobayashi
,
M.
Onchi
, and
M.
Nishijima
,
J. Chem. Phys.
83
,
428
(
1985
).
4.
U.
Höfer
,
P.
Morgen
,
W.
Wurth
, and
E.
Umbach
,
Phys. Rev. Lett.
55
,
2979
(
1985
).
5.
A. J.
Schell-Sorokin
and
J. E.
Demuth
,
Surf. Sci.
157
,
273
(
1985
).
6.
C.
Silvestre
and
M.
Shayegan
,
Phys. Rev. B
37
,
10432
(
1988
).
7.
J. P.
Pelz
and
R. H.
Koch
,
J. Vac. Sci. Technol. B
9
,
424
(
1991
).
8.
R.
Martel
,
Ph.
Avouris
, and
I.-W.
Lyo
,
Science
272
,
385
(
1996
).
9.
G.
Dujardin
,
A.
Mayne
,
G.
Comtet
,
L.
Hellner
,
M.
Jamet
,
E.
Le Goff
, and
P.
Millet
,
Phys. Rev. Lett.
76
,
3782
(
1996
).
10.
I.-S.
Hwang
,
R.-L.
Lo
, and
T. T.
Tsong
,
Phys. Rev. Lett.
78
,
4797
(
1997
).
11.
K.-Y.
Kim
,
T.-H.
Shin
,
S.-J.
Han
, and
H.
Kang
,
Phys. Rev. Lett.
82
,
1329
(
1999
).
12.
K.
Sakamoto
,
S.
Doi
,
Y.
Ushimi
,
K.
Ohno
,
H. W.
Yeom
,
T.
Ohta
,
S.
Suto
, and
W.
Uchida
,
Phys. Rev. B
60
,
R8465
(
1999
).
13.
F.
Matsui
,
H. W.
Yeom
,
K.
Amemiya
,
K.
Tono
, and
T.
Ohta
,
Phys. Rev. Lett.
85
,
630
(
2000
).
14.
T.
Jensen
,
L.-B.
Tækker
,
C.
Gundlach
,
F. K.
Dam
,
P.
Morgen
,
S. V.
Hoffman
,
Z.
Li
, and
K.
Pedersen
,
Phys. Rev. B
64
,
045304
(
2001
).
15.
G.
Comtet
,
L.
Hellner
,
G.
Dujardin
, and
K.
Bobrov
,
Phys. Rev. B
65
,
035315
(
2002
).
16.
K.
Sakamoto
,
F.
Matsui
,
M.
Hirano
,
H. W.
Yeom
,
H. M.
Zhang
, and
R. I. G.
Uhrberg
,
Phys. Rev. B
65
,
201309
(
2002
).
17.
H.
Okuyama
,
T.
Miki
,
T.
Aruga
, and
M.
Nishijima
,
Jpn. J. Appl. Phys., Part 2
41
,
L1419
(
2002
).
18.
K.
Sakamoto
,
H. M.
Zhang
, and
R. I. G.
Uhrberg
,
Phys. Rev. B
68
,
075302
(
2003
).
19.
A. J.
Mayne
,
F.
Rose
,
G.
Comtet
,
L.
Hellner
, and
G.
Dujardin
,
Surf. Sci.
528
,
132
(
2003
).
20.
H.
Okuyama
,
T.
Aruga
, and
M.
Nishijima
,
Phys. Rev. Lett.
91
,
256102
(
2003
).
21.
K.
Sakamoto
,
H. M.
Zhang
, and
R. I. G.
Uhrberg
,
Phys. Rev. B
70
,
035301
(
2004
).
22.
Y.
Konishi
,
S.
Yoshida
,
Y.
Sainoo
,
O.
Takeuchi
, and
H.
Shigekawa
,
Phys. Rev. B
70
,
165302
(
2004
).
23.
B.
Schubert
,
Ph.
Avouris
, and
R.
Hoffmann
,
J. Chem. Phys.
98
,
7593
(
1993
);
B.
Schubert
,
Ph.
Avouris
, and
R.
Hoffmann
,
J. Chem. Phys.
98
,
7606
(
1993
).
24.
H.
Kageshima
,
Y.
Ono
,
M.
Tabe
, and
T.
Ohno
,
Jpn. J. Appl. Phys., Part 1
33
,
4070
(
1994
).
25.
S.-H.
Lee
and
M.-H.
Kang
,
Phys. Rev. Lett.
82
,
968
(
1999
).
26.
S.-H.
Lee
and
M.-H.
Kang
,
Phys. Rev. B
61
,
8250
(
2000
).
27.
T.
Hoshino
and
Y.
Nishioka
,
Phys. Rev. B
61
,
4705
(
2000
).
28.
M.-H.
Tsai
,
Y.-H.
Tang
,
I.-S.
Hwang
, and
T. T.
Tsong
,
Phys. Rev. B
66
,
241304
(
2002
).
29.
H. W.
Yeom
,
Phys. Rev. B
66
,
157301
(
2002
).
30.
H.
Ibach
and
D. L.
Mills
,
Electron Energy-Loss Specroscopy and Surface Vibrations
(
Academic
, New York,
1982
).
You do not currently have access to this content.