Measurements of electron transport, effective ionization, and attachment coefficients are reported for C2F4. In addition, measurements of the electron drift velocity and the effective ionization coefficient as a function of the density-reduced electric field E/N are reported for mixtures of C2F4 with Ar. The measured effective ionization coefficients in C2F4/Ar mixtures indicates a contribution to these coefficients from Penning ionization in dilute C2F4/Ar mixtures. The rate constant for electron attachment to C2F4 as well as the product of the longitudinal electron diffusion coefficient and the gas number density NDL in mixtures of C2F4 with Ar as functions of E/N are also reported.

1.
H.
Kimura
,
K.
Shiozawa
,
K.
Kawai
,
H.
Miyatake
, and
M.
Yoneda
,
Jpn. J. Appl. Phys.
34
,
2114
(
1995
).
2.
T.
Maruyama
,
N.
Fujwara
,
K.
Shiozawa
, and
M.
Yoneda
,
J. Vac. Sci. Technol. A
13
,
810
(
1995
).
3.
K.
Miyata
,
M.
Hori
, and
T.
Goto
,
Jpn. J. Appl. Phys.
36
,
5340
(
1997
).
4.
S. Samukawa and T. Mukai, in International Symposium on Electron–Molecule Collisions and Swarms, edited by Y. Hatano, H. Tanaka, and N. Kouchi (Tokyo Institute of Technology, Tokyo, Japan, 1999), p. 76.
5.
K.
Nojiri
and
E.
Iguchi
,
J. Vac. Sci. Technol. B
13
,
1451
(
1995
).
6.
L. G. Christophorou and J. K. Olthoff, J. Phys. Chem. Ref. Data (submitted).
7.
J. N.
Butler
,
J. Am. Chem. Soc.
84
,
1393
(
1962
).
8.
J. M.
Simmie
,
W. J.
Quiring
, and
E.
Tschuikow-Roux
,
J. Phys. Chem.
73
,
3830
(
1969
).
9.
J. M.
Preses
,
R. E.
Weston
, Jr.
, and
G. W.
Flynn
,
Chem. Phys. Lett.
46
,
69
(
1977
).
10.
M.
Quack
and
G.
Seyfang
,
Ber. Bunsenges. Phys. Chem.
86
,
504
(
1982
).
11.
E.
Pochon
,
R. E.
Weston
, Jr.
, and
G. W.
Flynn
,
J. Phys. Chem.
89
,
86
(
1985
).
12.
A.
Yokoyama
,
K.
Yokoyama
, and
G.
Fujisawa
,
Chem. Phys. Lett.
237
,
106
(
1995
).
13.
A. Gleizes (private communication).
14.
I.
Coll
,
A. M.
Casanovas
,
L.
Vial
,
A.
Gleizes
, and
J.
Casanovas
,
J. Phys. D
33
,
221
(
2000
).
15.
S. R. Hunter and L. G. Christophorou, in Electron–Molecule Interactions and Their Applications (Academic, New York, 1984), Vol. 2, Chap. 3.
16.
Y.
Wang
,
L. G.
Christophouou
, and
J. K.
Verbrugge
,
J. Chem. Phys.
109
,
8304
(
1998
).
17.
Y. Wang, L. G. Christophorou, J. K. Olthoff, and J. K. Verbrugge, in Gaseous Dielectrics VIII, edited by L. Christophorou and J. Olthoff (Plenum, New York, 1999), p. 39.
18.
P. G.
Datskos
,
J. G.
Carter
, and
L. G.
Christophorou
,
J. Appl. Phys.
71
,
15
(
1991
).
19.
J.
de Urquijo
,
I.
Alvarez
,
E.
Basurto
, and
C.
Cisneros
,
J. Phys. D
32
,
1646
(
1999
).
20.
J.
de Urquijo
,
I.
Alvarez
, and
C.
Cisneros
,
Phys. Rev. E
60
,
4990
(
1999
).
21.
Certain commercial equipment, instruments, or materials are identified in this paper in order to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.
22.
See EPAPS Document No. E-JCPSA6-114-002121 for tabulated values of electron drift velocities and effective ionization coefficients for C2F4 and C2F4/Ar mixtures.
This document may be retrieved via the EPAPS homepage (http://www.aip.org/pubservs/epaps.html) or from ftp.aip.org in the directory /epaps/. See the EPAPS homepage for more information.
23.
L. G. Christophorou, in Atomic and Molecular Radiation Physics (Wiley–Interscience, New York, 1971), Chap. 4, p. 239.
24.
Y.
Wang
,
L. G.
Christophorou
,
J. K.
Olthoff
, and
J. K.
Verbrugge
,
Chem. Phys. Lett.
304
,
303
(
1999
).
25.
L. G. Christophorou, in Atomic and Molecular Radiation Physics (Wiley–Interscience, New York, 1971), p. 283.
26.
J.
Dutton
,
J. Phys. Chem. Ref. Data
4
,
577
(
1975
).
27.
S. G.
Lias
,
J. E.
Bartmess
,
J. F.
Liebman
,
J. L.
Holmes
,
R. D.
Levin
, and
W. G.
Mallard
,
J. Phys. Chem. Ref. Data, Suppl.
17
,
1
(
1988
).
28.
L. G. Christophorou, Atomic and Molecular Radiation Physics (Wiley–Interscience, New York, 1971), Chap. 2, pp. 50 and 52.
29.
N. S.
Chiu
,
P. D.
Burrow
, and
K. D.
Jordan
,
Chem. Phys. Lett.
68
,
121
(
1979
).
30.
E.
Illenberger
,
Chem. Rev.
92
,
1589
(
1992
).
31.
C. D.
Cooper
and
R. N.
Compton
,
J. Chem. Phys.
60
,
2424
(
1974
).
32.
H. Tanaka (private communication).
33.
M. Okamoto, M. Hoshino, Y. Sakamoto, S. Watanabe, M. Kitajima, H. Tanaka, and M. Kimura, in Proceedings of the International Symposium on Electron–Molecule Collisions and Swarms, edited by H. Hatano, H. Tanaka, and N. Kouchi (Tokyo Institute of Technology, Tokyo, Japan, 1999), p. 191.
34.
M. N.
Paddon-Row
,
N. G.
Rondan
,
K. N.
Houk
, and
K. D.
Jordan
,
J. Am. Chem. Soc.
104
,
1143
(
1982
).
35.
J. E.
Bloor
,
R. A.
Paysen
, and
R. E.
Sherrod
,
Chem. Phys. Lett.
60
,
476
(
1979
).
36.
R. I.
McNeil
,
M.
Shiotani
,
F.
Williams
, and
M. B.
Yim
,
Chem. Phys. Lett.
51
,
433
(
1977
).
37.
R. I.
McNeil
,
F.
Williams
, and
M. B.
Yim
,
Chem. Phys. Lett.
61
,
293
(
1979
).
This content is only available via PDF.

Supplementary Material

You do not currently have access to this content.