A novel calibration method for the determination of absolute species densities by laser spectroscopy with two-photon absorption is presented. The method is based on a comparative measurement with a noble gas which has a two-photon resonance spectrally close to the transition investigated. Application of this scheme for the calibration of LIF measurements to determine atomic oxygen, generated in a capacitively coupled rf reactor, and for calibration of a RIS measurement of atomic oxygen and carbon generated by sputtering is demonstrated. The relevant excitation cross section of the involved xenon state, which is used for calibration of atomic oxygen densities, is determined.
REFERENCES
1.
D.
Wagner
, B.
Dikmen
, and H. F.
Döbele
, Rev. Sci. Instrum.
67
, 1800
(1996
).2.
D.
Romanini
, A. A.
Kachanow
, N.
Sadhegi
, and F.
Stoekel
, Chem. Phys. Lett.
264
, 316
(1997
).3.
R.
Dux
, K.
Grützmacher
, M. I.
de la Rosa
, and B.
Wende
, Phys. Rev. E
51
, 1416
(1995
).4.
P. Bogen, Proc. XVI International Conference on Phenomena in Ionized Gases, Düsseldorf (1983).
5.
A. Goehlich thesis, Universität GH Essen, 1994.
6.
M. A. Clyne and W. S. Nip in Reactive Intermediates in the Gas Phase, edited by D. W. Setser (Academic, New York, 1979).
7.
G. S. Hurst and M. G. Payne, Principles and Applications of Resonance Ionization Spectroscopy (Hilger, Bristol, 1988).
8.
J. E. M. Goldsmith, Twentieth Symposium (International) on Combustion (The Combustion Institute, Pittsburgh, 1984), p. 1331.
9.
10.
11.
12.
R. Loudon, The Quantum Theory of Light, 2nd ed. (Clarendon, Oxford, 1983).
13.
H.
Horiguchi
, R. S. F.
Chang
, and D. W.
Setser
, J. Chem. Phys.
75
, 1207
(1981
).14.
J.
Sabbagh
and N.
Sadhegi
, J. Quant. Spectrosc. Radiat. Transf.
17
, 297
(1977
).15.
S.
Kröll
, P. S.
Ganas
, and A. E. S.
Green
, Phys. Rev. A
41
, 1340
(1990
).16.
17.
R. P. Cowan, The Theory of Atomic Structure and Spectra (University of California Press, Berkeley, 1981).
18.
19.
20.
21.
D. J.
Bamford
, L. E.
Junsinski
, W. K.
Bischel
, Phys. Rev. A
34
, 185
(1986
).22.
I. I. Sobelman, Atomic Spectra and Radiative Transitions, Springer Series in Chemical Physics 1 (Springer, New York, 1979).
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