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Research Article| October 01 1964

Comment on ``Sputtering Ion Source for Solids''

Harold P. Smith, Jr.

Harold P. Smith, Jr.

Space Sciences Laboratory, University of California, Berkeley 4, California

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J. Appl. Phys. 35, 3067 (1964)

https://doi.org/10.1063/1.1713180

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This content is only available via PDF.

© 1964 The American Institute of Physics.

1964

The American Institute of Physics

Figures & Tables

Supplementary Material

1.

H. J.

Liebl

and

R. F. K.

Herzog

,

J. Appl. Phys.

34

,

2893

(

1963

).

2.

I.

Langmuir

and

K. H.

Kingdon

,

Proc. Roy. Soc. (London)

107

,

61

(

1925

).

3.

Hipple

and

Blechschmidt

,

Ann. Physik

81

,

1043

(

1926

);

Hipple

and

Blechschmidt

,

86

,

1006

(

1928

).,

Ann. Phys.

4.

C. H.

Townes

,

Phys. Rev.

65

,

319

(

1944

).

5.

K. H.

Kingdon

and

I.

Langmuir

,

Phys. Rev.

20

,

108

(

1922

);

K. H.

Kingdon

and

I.

Langmuir

,

21

,

210

(

1923

); ,

Phys. Rev.

K. H.

Kingdon

and

I.

Langmuir

,

22

,

148

(

1923

).,

Phys. Rev.

6.

G. K.

Wehner

,

J. Appl. Phys.

26

,

1956

(

1955

).

7.

R. L.

Cunningham

,

K. V.

Gow

, and

J.

Ng‐Yelim

,

J. Appl. Phys.

34

,

984

(

1963

).

8.

R. H.

Silsbee

,

J. Appl. Phys.

28

,

1246

(

1957

).

9.

A. J.

Smith

,

L. A.

Cambey

, and

D. J.

Marshall

,

J. Appl. Phys.

34

,

2489

(

1963

).

10.

R. C.

Bradley

and

E.

Ruedl

,

J. Appl. Phys.

33

,

880

(

1962

).