This paper presents a Monte Carlo (MC) simulation tool which is applied to describe the ion beam induced damage generated by electronic excitation in LiNbO3. Based on a previously published thermal spike based analytical model, the MC technique allows for a more flexible and accurate treatment of the problem. A main advantage of this approach with respect to the analytical one is the possibility of studying the role of statistical fluctuations, relevant at low fluences. The paper recalls the main features of the physical model, describes the MC algorithm, and compares simulation results to experimental data (irradiations of LiNbO3 using silicon ions at 5 and 7.5MeV and oxygen ions at 5MeV).

1.
J. K.
Hirvonen
,
Ion Implantation and Ion Beam Processing
(
North-Holland
,
Amsterdam
,
1984
).
2.
F.
Agulló-López
,
C. R. A.
Catlow
, and
P. D.
Townsend
,
Point Defects in Materials
(
Academic
,
London
,
1988
).
3.
J. P.
Ziegler
,
Ion Implantation Technology
(
North-Holland
,
Amsterdam
,
1992
).
4.
P. D.
Townsend
,
P. J.
Chandler
, and
L.
Zhang
,
Optical Effects of Ion Implantation
(
Cambridge University Press
,
Cambridge
,
1994
).
5.
K.
Bethge
and
R.
Spohr
, in
Ion Tracks and Microtechnology: Basic Principles and Applications
(
Vieweg
,
Braunschweig
,
1990
).
6.
M.
Toulemonde
,
S.
Bouffard
, and
F.
Studer
,
Nucl. Instrum. Methods Phys. Res. B
91
,
108
(
1994
).
7.
M.
Toulemonde
,
C.
Trautmann
,
E.
Balanzat
,
K.
Hjort
, and
A.
Weidinger
,
Nucl. Instrum. Methods Phys. Res. B
216
,
1
(
2004
).
8.
G. G.
Bentini
 et al,
J. Appl. Phys.
92
,
6477
(
2002
).
9.
G. G.
Bentini
 et al,
J. Appl. Phys.
96
,
242
(
2004
).
10.
J.
Olivares
,
G.
García
,
F.
Agulló-López
,
F.
Agulló-Rueda
,
J. C.
Soares
, and
A.
Kling
,
Nucl. Instrum. Methods Phys. Res. B
242
,
534
(
2005
).
11.
J.
Olivares
,
G.
García
,
F.
Agulló-López
,
F.
Agulló-Rueda
,
A.
Kling
, and
J. C.
Soares
,
Appl. Phys. A: Mater. Sci. Process.
81
,
1465
(
2005
).
12.
J.
Olivares
,
G.
García
,
A.
García-Navarro
,
F.
Agulló-López
,
O.
Caballero
, and
A.
García-Cabañes
,
Appl. Phys. Lett.
86
,
183501
(
2005
).
13.
14.
B.
Canut
and
S. M. M.
Ramos
,
Radiat. Eff. Defects Solids
145
,
1
(
1998
).
15.
M.
Toulemonde
,
Ch.
Dufour
,
A.
Meftah
, and
E.
Paumier
,
Nucl. Instrum. Methods Phys. Res. B
166–167
,
903
(
2000
).
16.
E. M.
Bringa
,
R. E.
Johnson
, and
M.
Jakas
,
Phys. Rev. B
60
,
15107
(
1999
).
17.
M.
Jakas
,
E. M.
Bringa
, and
R. E.
Johnson
,
Phys. Rev. B
65
,
165425
1
(
2002
).
18.
F.
Agulló-López
,
G.
García
, and
J.
Olivares
,
J. Appl. Phys.
97
,
093514
(
2005
).
19.
A.
Climent-Font
,
F.
Paszti
,
G.
García
,
M. T.
Fernández-Jiménez
, and
F.
Agulló-López
,
Nucl. Instrum. Methods Phys. Res. B
219–220
,
400
(
2004
).
21.
D. J. W.
Mous
,
A.
Gottdang
,
R. G.
Haitsma
,
G.
García López
,
A.
Climent-Font
,
F.
Agulló-López
, and
D. O.
Boerma
,
AIP Conf. Proc.
680
,
999
(
2003
).
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