Electroluminescence (EL) properties in the ultraviolet (UV) range were studied on Gd-implanted indium tin oxide/SiO2:GdSi metal-oxide-semiconductor light emitting devices. The efficient UV line at 316nm from Gd3+ centers shows a maximum power density of 2mWcm2 and a quantum efficiency above 5%. The Gd3+ luminescent center has an excitation cross section above 7.4×1015cm2 with an EL decay time around 1.6ms at a Gd concentration of 3%. A decrease of the EL efficiency is observed by a cross relaxation at a high Gd concentration and by clustering of Gd atoms at an annealing temperature of 1000°C. A strong quenching of the UV EL due to electron trapping around optically active Gd3+ centers is observed during the injection of hot electrons.

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