Analysis of uncompensated Langmuir probe characteristics in radio-frequency discharges revisited

Measurements of the electron temperature, plasma density, and floating and plasma potentials with Langmuir probes in radio-frequency discharges often represent a challenge due to rf oscillations of the plasma potential. These oscillations distort the probe characteristic, resulting in wrong estimates of the plasma parameters. Both active and passive rf compensation methods have previously been used to eliminate rf fluctuation effects on the electron current drawn by an electrostatic probe. These effects on an uncompensated probe have been theoretically and experimentally studied by Garscadden and Emeleus [Proc. Phys. Soc. London 79, 535 (1962)], Boschi and Magistrelli [Nuovo Cimento 29, 487 (1963)], and Crawford [J. Appl. Phys. 34, 1897 (1963)]. They have shown theoretically that, assuming a Maxwellian distribution and sinusoidal plasma-potential oscillation, the electron temperature can be deduced directly from an uncompensated Langmuir probe trace, by taking the natural logarithm of the electron current. It is the purpose of this paper to bring back the attention onto this result, which shows that under certain discharge conditions it is not necessary to build any rf compensation in a Langmuir probe system. Here we present and reference experimental data found on the literature which support this result. Also computational data are presented.