In this paper, the conduction mechanisms in Si////Au metal-insulator-semiconductor capacitors have been investigated. The dielectric stack has been produced by metal-organic chemical-vapor deposition. Nanoscopic and microscopic capacitance properties have been correlated. The capacitance-voltage characteristics of 25-μm-radius metal-oxide-semiconductor capacitors have been evaluated and compared to the measurements performed by scanning capacitance microscopy (SCM). The study of the SCM images allows us to confirm the value of interface state density obtained by investigation excluding any defect or grain-boundary contribution in the capacitance phenomena. The conduction mechanisms have been investigated by current-density–voltage measurements performed at different temperatures (from 100 to 200 °C). At low electric fields, a slight dependence of characteristics in function of both temperature and electric field has been observed, while a relatively strong dependence at high fields has been found. Hill’s diagram indicated that at high electric fields the conduction follows the Poole-Frenkel mechanism. Finally, Hill’s diagram points out that the traps contributing to the conduction phenomena are approximately at the midgap value.
Skip Nav Destination
Article navigation
15 August 2005
Research Article|
August 22 2005
From micro- to nanotransport properties in -based thin layers
P. Fiorenza;
P. Fiorenza
Consiglio Nazionale delle Ricerche (CNR) - Istituto per la Microelettronica e Microsistemi (IMM)
, Stradale Primosole, 50, 95121 Catania, Italy and Dipartimento di Scienze Chimiche, Università di Catania
, Viale Andrea Doria 6, 95125 Catania, Italy
Search for other works by this author on:
R. Lo Nigro;
R. Lo Nigro
Consiglio Nazionale delle Ricerche (CNR) - Istituto per la Microelettronica e Microsistemi (IMM)
, Stradale Primosole, 50, 95121 Catania, Italy
Search for other works by this author on:
V. Raineri;
V. Raineri
a)
Consiglio Nazionale delle Ricerche (CNR) - Istituto per la Microelettronica e Microsistemi (IMM)
, Stradale Primosole, 50, 95121 Catania, Italy
Search for other works by this author on:
S. Lombardo;
S. Lombardo
Consiglio Nazionale delle Ricerche (CNR) - Istituto per la Microelettronica e Microsistemi (IMM)
, Stradale Primosole, 50, 95121 Catania, Italy
Search for other works by this author on:
R. G. Toro;
R. G. Toro
Dipartimento di Scienze Chimiche,
Università di Catania
, Viale Andrea Doria 6, 95125 Catania, Italy
Search for other works by this author on:
G. Malandrino;
G. Malandrino
Dipartimento di Scienze Chimiche,
Università di Catania
, Viale Andrea Doria 6, 95125 Catania, Italy
Search for other works by this author on:
I. L. Fragalà
I. L. Fragalà
Dipartimento di Scienze Chimiche,
Università di Catania
, Viale Andrea Doria 6, 95125 Catania, Italy
Search for other works by this author on:
a)
Electronic mail: [email protected]
J. Appl. Phys. 98, 044312 (2005)
Article history
Received:
January 17 2005
Accepted:
July 07 2005
Citation
P. Fiorenza, R. Lo Nigro, V. Raineri, S. Lombardo, R. G. Toro, G. Malandrino, I. L. Fragalà; From micro- to nanotransport properties in -based thin layers. J. Appl. Phys. 15 August 2005; 98 (4): 044312. https://doi.org/10.1063/1.2012514
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
Elastic moduli and thermal conductivity of quantum materials at finite temperature
Dylan A. Folkner, Zekun Chen, et al.
Distinct deformation mechanisms of silicate glasses under nanoindentation: The critical role of structure
Ziming Yan, Ranran Lu, et al.
Related Content
Nondestructive dopant profile measurement and its quantitative analysis using the nanocapacitance–voltage method
J. Vac. Sci. Technol. B (February 2004)
Surface functionalized Ba 0.6 Sr 0.4 TiO 3 /poly(vinylidene fluoride) nanocomposites with significantly enhanced dielectric properties
Appl. Phys. Lett. (November 2009)
Breakdown kinetics of Pr 2 O 3 films by conductive-atomic force microscopy
Appl. Phys. Lett. (December 2005)
Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory
J. Vac. Sci. Technol. A (November 2021)
Drift mobility in quantum nanostructures by scanning probe microscopy
Appl. Phys. Lett. (January 2006)