A thermal-spike model has been applied to characterize the damage structure of the latent tracks generated by high-energy ion irradiations on through electron excitation mechanisms. It applies to ions having electronic stopping powers both below and above the threshold value for lattice amorphization. The model allows to estimate the defect concentrations in the heavily damaged (preamorphized) regions that have not reached the threshold for amorphization. They include the halo and tail surrounding the core of a latent track. The existence of the preamorphized regions accounts for a synergy between successive irradiations and predicts a dependence of the amorphization threshold on previous irradiation fluence. The predicted dependence is in accordance with irradiation experiments using N , O , F , and Si (5 and ). For electronic stopping powers above the threshold value the model describes the generation of homogeneous amorphous layers and predicts the propagation of the amorphization front with fluence. A theoretical expression, describing this propagation, has been obtained that is in reasonable agreement with silicon irradiation experiments at 5 and . The accordance is improved by including in a simple phenomenological way the velocity effect on the threshold. At the highest fluences (or depths) a significant discrepancy appears that may be attributed to the contribution of the nuclear collision damage.
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1 May 2005
Research Article|
April 20 2005
Lattice preamorphization by ion irradiation: Fluence dependence of the electronic stopping power threshold for amorphization
F. Agulló-López;
F. Agulló-López
a)
Departamento de Física de Materiales, C-IV,
Universidad Autónoma de Madrid
, Cantoblanco, E-28049 Madrid, Spain and Centro de Microanálisis de Materiales (CMAM), Universidad Autónoma de Madrid
, Cantoblanco, E-28049 Madrid, Spain
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G. García;
G. García
Centro de Microanálisis de Materiales (CMAM),
Universidad Autónoma de Madrid
, Cantoblanco, E-28049 Madrid, Spain
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J. Olivares
J. Olivares
Instituto de Óptica “Daza de Valdés”
, Consejo Superior de Investigaciones Cientificas (CSIC), Calle Serrano 121, E-28006 Madrid, Spain
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a)
Author to whom correspondence should be addressed; electronic mail: fal@uam.es
J. Appl. Phys. 97, 093514 (2005)
Article history
Received:
November 04 2004
Accepted:
February 28 2005
Citation
F. Agulló-López, G. García, J. Olivares; Lattice preamorphization by ion irradiation: Fluence dependence of the electronic stopping power threshold for amorphization. J. Appl. Phys. 1 May 2005; 97 (9): 093514. https://doi.org/10.1063/1.1896444
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