The chemical composition, amount of cross-linking and its influence on the mechanical properties of poly(methyl methacrylate) (PMMA) thin films produced by pulsed laser deposition (PLD) at a wavelength of 248nm under ultrahigh vacuum were investigated by infrared spectroscopy, scanning electron microscopy, size-exclusion chromatography, thermogravimetric analysis, and nanoindentation experiments. The films consist of two components, one fraction with a molecular weight well below that of the target material and a second fraction, which is cross-linked. Compared to bulk material, the Young’s modulus of the film is increased. The amount of cross-linking in the film can be tuned by the applied laser fluence leading to changes of the mechanical properties.

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