Electron paramagnetic resonance (EPR) was used to study the annealing behavior of the positively charged carbon vacancy (EI5 center) in electron-irradiated 4H-SiC. At 1000°C the EPR signal of the defect starts decreasing gradually. Clear ligand hyperfine structure is still observed after annealing at 1350°C, while the central line can be detected after a 1600°C anneal. A similar annealing behavior was also observed for the EI6 center suggesting that this defect may be also the positively charged carbon vacancy but at the hexagonal lattice site.

1.
N. T.
Son
,
P. N.
Hai
, and
E.
Janzén
,
Phys. Rev. B
63
, R
201201
(
2001
).
2.
V. Ya.
Bratus
,
I. N.
Makeeva
,
S. M.
Okulov
,
T. L.
Petrenko
,
T. T.
Petrenko
, and
H. J. von
Bardeleben
,
Mater. Sci. Forum
353–356
,
517
(
2001
).
3.
N. T.
Son
,
B.
Magnusson
, and
E.
Janzén
,
Appl. Phys. Lett.
81
,
3945
(
2002
).
4.
L.
Torpo
,
M.
Marlo
,
T. E. M.
Staab
, and
R. M.
Nieminen
,
J. Phys.: Condens. Matter
13
,
6203
(
2001
).
5.
A.
Zywietz
,
J.
Furthmüller
, and
F.
Bechstedt
,
Phys. Rev. B
59
,
15166
(
1999
).
6.
A.
Gali
,
P.
Deák
,
N. T.
Son
,
E.
Janzén
,
H. J. von
Bardeleben
, and
J. L.
Monge
,
Mater. Sci. Forum
433–436
,
511
(
2003
).
7.
M.
Bockestedte
,
M.
Heid
,
A.
Mattausch
, and
O.
Pankratov
,
Mater. Sci. Forum
389–393
,
471
(
2002
);
M.
Bockestedte
,
M.
Heid
,
A.
Mattaush
, and
O.
Pankratov
,
Mater. Sci. Forum
433–436
,
471
(
2003
).
8.
M.
Bockstedte
,
M.
Heid
, and
O.
Pankratov
,
Phys. Rev. B
67
,
193102
(
2003
).
9.
N. T.
Son
,
P. N.
Hai
, and
E.
Janzén
,
Phys. Rev. Lett.
87
,
045502
(
2001
).
10.
C. C.
Ling
,
C. D.
Beling
, and
S.
Fung
,
Phys. Rev. B
62
,
8016
(
2000
).
11.
E.
Rauls
,
Th.
Frauenheim
,
A.
Gali
, and
P.
Deák
,
Phys. Rev. B
68
,
155208
(
2003
).
12.
N. T.
Son
,
P. N.
Hai
, and
E.
Janzén
,
Mater. Sci. Forum
353–356
,
499
(
2001
).
13.
H.
Itoh
 et al,
Phys. Status Solidi A
162
,
173
(
1997
).
14.
Th.
Lingner
,
S.
Greulich-Weber
,
J.-M.
Spaeth
,
U.
Gerstmann
,
E.
Rauls
,
Z.
Hajnal
,
Th.
Frauenheim
, and
H.
Overhof
,
Phys. Rev. B
64
,
245212
(
2001
).
15.
V. Ya.
Bratus
,
I. N.
Makeeva
,
S. M.
Okulov
,
T. L.
Petrenko
,
T. T.
Petrenko
, and
H. J. von
Bardeleben
,
Physica B
308–310
,
621
(
2001
).
You do not currently have access to this content.