This paper reports an experimental study of the elastic deformation of a 200μm thick microfabricated square membrane with sides ranging from 8.5mmto15mm as indented by a fine cylindrical, flat-ended punch with diameter 500μm in the presence of long-range intersurface forces. An apparatus was constructed to allow simultaneously measurements of the indenter displacement and the applied force. A number of interesting phenomena such as the “jump-into-contact” and the “pull-off” between the membrane and the moving cylinder were observed. A simple theoretical analysis using linear elasticity was adopted to fit the load-displacement curve (compliance) and thus estimated the Young’s modulus of the membrane. The measured parameters are consistent with data reported in literature.

1.
T. W.
Thomas
and
P. A.
DiMilla
,
Med. Biol. Eng. Comput.
38
,
360
(
2000
).
2.
M. A.
Peterson
,
Biophys. J.
71
,
657
(
1996
).
3.
X.
Yang
,
C.
Grosjean
, and
Y. C.
Tai
,
J. Microelectromech. Syst.
8
,
393
(
1999
).
4.
B. J.
Briscoe
,
K. S.
Sebastian
, and
S. K.
Sinha
,
Philos. Mag. A
74
,
1159
(
1996
).
5.
F.
Yang
,
Mater. Sci. Eng., A
358
,
226
(
2003
).
6.
K. T.
Wan
and
K.
Liao
,
Thin Solid Films
352
,
167
(
1999
).
7.
K. K.
Liu
,
H. S.
Khoo
, and
F. G.
Tseng
,
Rev. Sci. Instrum.
75
,
524
(
2004
).
8.
B. J.
Briscoe
,
K. K.
Liu
, and
D. R.
Williams
,
J. Colloid Interface Sci.
200
,
256
(
1998
).
9.
J.
Israelachvili
,
Intermolecular & Surface Forces
, 2nd ed. (
Academic Press
, London,
1992
).
10.
K. T.
Wan
,
J. Appl. Mech.
69
,
110
(
2002
).
11.
B. F.
Ju
,
K. K.
Liu
, and
K. T.
Wan
, Proc. R. Soc. London, Ser. A (submitted).
12.
K. K.
Liu
,
D. R.
Williams
, and
B. J.
Briscoe
,
Phys. Rev. E
54
6673
(
1996
).
13.
S.
Timoshenko
and
K.
Woinowsky
,
Theory of Plates and Shells
, 2nd ed. (
McGraw-Hill
, New York,
1970
).
14.
J. N.
Israelachili
and
D.
Tabor
,
Proc. R. Soc. London, Ser. A
331
,
19
(
1972
).
15.
M.
Khoo
and
C.
Liu
,
Sens. Actuators, A
89
,
259
(
2001
).
16.
D.
Armani
,
C.
Liu
, and
N.
Aluru
,
Proceedings of IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots
, Orlando, FL, 17–21 January
1999
, pp.
222
227
.
17.
K. T.
Wan
,
J. Adhes.
70
,
209
(
1999
).
18.
E.
Cerda
and
L.
Mahadevan
,
Phys. Rev. Lett.
90
,
074302
(
2003
).
19.
W.
Xu
,
P. J.
Mulhern
,
B. L.
Blackford
,
M. H.
Jericho
,
M.
Firtel
, and
T. J.
Beveridge
,
J. Bacteriol.
178
,
3106
(
1996
).
20.
Y.
Sun
,
K. T.
Wan
,
K. P.
Roberts
,
J. C.
Bischof
, and
B. J.
Nelson
,
IEEE Nanobioscience
2
,
279
(
2003
).
You do not currently have access to this content.