The mechanical properties—Young’s modulus (E) and hardness (H)—of diamond-like carbon (DLC) thin films deposited on Si (100) by filtered cathodic vacuum arc with different substrate bias voltage have been studied by nanoindentation measurement, where the substrate effect is included. Their intrinsic properties [including E,H, and yield strength (Y)] without the substrate effect are then derived by finite element analysis. The results show that the intrinsic mechanical properties of the DLC thin films are not affected by the film thickness, but significantly affected by change of bonding fraction caused by varied substrate bias. An empirical relationship among E, Y, and H for DLC thin films has been built, where E, Y, and H are intrinsic properties of DLC thin films. It is also confirmed that, as an empirical rule, the measured H could be used to represent its intrinsic value when the indentation depth is limited to 10% of the film thickness. However, the measured E with the substrate effect does not observe this empirical rule.
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1 April 2004
Research Article|
April 01 2004
Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc
Zhenghao Gan;
Zhenghao Gan
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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Yuebin Zhang;
Yuebin Zhang
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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Guoqing Yu;
Guoqing Yu
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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C. M. Tan;
C. M. Tan
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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S. P. Lau;
S. P. Lau
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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B. K. Tay
B. K. Tay
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
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Zhenghao Gan
Yuebin Zhang
Guoqing Yu
C. M. Tan
S. P. Lau
B. K. Tay
Ion beam Processing Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Block S1, Nanyang Avenue, Singapore 639798, Singapore
J. Appl. Phys. 95, 3509–3515 (2004)
Article history
Received:
December 02 2003
Accepted:
January 19 2004
Citation
Zhenghao Gan, Yuebin Zhang, Guoqing Yu, C. M. Tan, S. P. Lau, B. K. Tay; Intrinsic mechanical properties of diamond-like carbon thin films deposited by filtered cathodic vacuum arc. J. Appl. Phys. 1 April 2004; 95 (7): 3509–3515. https://doi.org/10.1063/1.1667005
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