We present further developments and understanding of the commonly observed crosshatch surface morphology in strain-relaxed heteroepitaxial films. We have previously proposed that the crosshatch morphology is directly related with strain relaxation via threading dislocation glide which results in both surface step and misfit dislocation (MD) formation [see Andrews et al., J. Appl. Phys. 91, 1933 (2002)—now referred to as Part I]. In this article, we have used solutions for the stress fields and displacement fields for periodic MD arrays which include the effects of the free surface. These solutions avoid truncation errors associated with finite dislocation arrays that were used in Part I. We have calculated the surface height profile for relaxed films where the misfit dislocations were introduced randomly or the misfit dislocations were placed in groups with alternating sign of the normal component of their Burgers vector. We have calculated the surface height profiles where the slip step remains at the surface [“slip step only” (SSO)] and where the slip step is eliminated [“slip step eliminated” (SSE)] due to annihilation of opposite sense steps, such as could happen during growth or lateral mass transport. For relaxed films, we find that the surface height undulations, characteristic of crosshatch, increase with increasing film thickness for the SSO case, whereas the surface becomes flatter for the SSE case. Experiments on relaxed films on (001) GaAs show that the surface height undulations in the [110] direction increase with increasing film thickness. Thus, we conclude that with increasing film thickness the crosshatch in the slow diffusion [110] direction is best described by the SSO case.
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1 June 2004
Research Article|
June 01 2004
Modeling crosshatch surface morphology in growing mismatched layers. Part II: Periodic boundary conditions and dislocation groups Available to Purchase
A. M. Andrews;
A. M. Andrews
Materials Department, University of California, Santa Barbara, California 93106
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R. LeSar;
R. LeSar
Materials Department, University of California, Santa Barbara, California 93106
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M. A. Kerner;
M. A. Kerner
Materials Department, University of California, Santa Barbara, California 93106
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J. S. Speck;
J. S. Speck
Materials Department, University of California, Santa Barbara, California 93106
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A. E. Romanov;
A. E. Romanov
Ioffe Physico-Technical Institute, Russian Academy of Sciences, Polytechnicheskaya 26, RU-194021, St. Petersburg, Russia
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A. L. Kolesnikova;
A. L. Kolesnikova
Institute for Problems of Mechanical Engineering, Russian Academy of Sciences, Bolshoj 61, Vas. Ostrov, RU-199178, St. Petersburg, Russia
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M. Bobeth;
M. Bobeth
Technical University Dresden, Hallwachsstrasse 3, 01062, Dresden, Germany
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W. Pompe
W. Pompe
Technical University Dresden, Hallwachsstrasse 3, 01062, Dresden, Germany
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A. M. Andrews
Materials Department, University of California, Santa Barbara, California 93106
R. LeSar
Materials Department, University of California, Santa Barbara, California 93106
M. A. Kerner
Materials Department, University of California, Santa Barbara, California 93106
J. S. Speck
Materials Department, University of California, Santa Barbara, California 93106
A. E. Romanov
Ioffe Physico-Technical Institute, Russian Academy of Sciences, Polytechnicheskaya 26, RU-194021, St. Petersburg, Russia
A. L. Kolesnikova
Institute for Problems of Mechanical Engineering, Russian Academy of Sciences, Bolshoj 61, Vas. Ostrov, RU-199178, St. Petersburg, Russia
M. Bobeth
Technical University Dresden, Hallwachsstrasse 3, 01062, Dresden, Germany
W. Pompe
Technical University Dresden, Hallwachsstrasse 3, 01062, Dresden, Germany
J. Appl. Phys. 95, 6032–6047 (2004)
Article history
Received:
December 10 2003
Accepted:
February 25 2004
Citation
A. M. Andrews, R. LeSar, M. A. Kerner, J. S. Speck, A. E. Romanov, A. L. Kolesnikova, M. Bobeth, W. Pompe; Modeling crosshatch surface morphology in growing mismatched layers. Part II: Periodic boundary conditions and dislocation groups. J. Appl. Phys. 1 June 2004; 95 (11): 6032–6047. https://doi.org/10.1063/1.1707208
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