The elastic and mechanical properties of high-quality cubic boron nitride (cBN) films with a few microns thickness and submicron grain size grown on silicon substrates by chemical vapor deposition were determined by measuring the dispersion of surface acoustic waves propagating along the surface of the layered system. The values are compared with those obtained with an ultralow load indenter (Triboscope). Specifically, the hardness, Young’s modulus and density of the film were measured.

1.
K.
Inagawa
,
K.
Watanabe
,
H.
Ohsone
,
K.
Saitoh
, and
A.
Itoh
,
J. Vac. Sci. Technol. A
5
,
2696
(
1987
).
2.
M.
Mieno
and
T.
Yoshida
,
Jpn. J. Appl. Phys., Part 1
29
,
L1175
(
1990
).
3.
H.
Saitoh
and
W.
Yarbrough
,
Appl. Phys. Lett.
58
,
2228
(
1991
).
4.
D. J.
Kester
and
R.
Messier
,
J. Appl. Phys.
72
,
504
(
1992
).
5.
D. L.
Medlin
,
T. A.
Friedmann
,
P. B.
Mirkarimi
,
P.
Rez
,
M. J.
Mills
, and
K. F.
McCarty
,
J. Appl. Phys.
76
,
3088
(
1994
).
6.
S.
Kinder
,
C. A.
Taylor
II
, and
R.
Clarke
,
Appl. Phys. Lett.
64
,
1859
(
1994
).
7.
T.
Ichiki
and
T.
Yoshida
,
Appl. Phys. Lett.
64
,
851
(
1994
).
8.
H.
Hofsäss
,
C.
Ronning
,
U.
Griesmeier
,
M.
Gross
,
S.
Reinke
, and
M.
Kuhr
,
Appl. Phys. Lett.
67
,
46
(
1995
).
9.
K.
Yamamoto
,
M.
Keunecke
, and
K.
Bewilogua
,
Thin Solid Films
377
,
331
(
2000
).
10.
S.
Matsumoto
and
W. J.
Zhang
,
Jpn. J. Appl. Phys., Part 2
39
,
L442
(
2000
).
11.
W. J.
Zhang
,
X.
Jiang
, and
S.
Matsumoto
,
Appl. Phys. Lett.
79
,
4530
(
2001
).
12.
X.
Jiang
,
W. J.
Zhang
,
X.
Helming
, and
S.
Matzumoto
,
Adv. Mat.
8
,
262
(
2002
).
13.
P. B.
Mirkarimi
,
D. L.
Medlin
,
K. F.
McCarty
,
D. C.
Dibble
,
W. M.
Clift
,
J. A.
Knapp
, and
J. C.
Barbour
,
J. Appl. Phys.
82
,
1617
(
1997
);
P. B.
Mirkarimi
,
K. F.
McCarty
, and
D. L.
Medlin
,
Mater. Sci. Eng., R.
21
,
47
(
1997
).
14.
U.
Harms
,
M.
Gaertner
,
A.
Schutze
,
K.
Bewilogua
, and
H.
Neuhauser
,
Thin Solid Films
385
,
275
(
2001
).
15.
T.
Wittkowski
,
J.
Jorzick
,
K.
Jung
,
B.
Hillebrands
,
M.
Keunecke
, and
K.
Bewilogua
,
J. Appl. Phys.
91
,
2729
(
2002
).
16.
G.
Lehmann
,
P.
Hess
,
S.
Weissmantel
,
G.
Reisse
,
P.
Scheible
, and
A.
Lunk
,
Appl. Phys. A: Mater. Sci. Process.
74
,
41
(
2002
).
17.
W. J.
Zhang
and
S.
Matsumoto
,
Phys. Rev. B
63
,
073201
(
2001
).
18.
A.
Neubrand
and
P.
Hess
,
J. Appl. Phys.
71
,
277
(
1991
).
19.
H.
Coufal
,
R.
Grygier
,
P.
Hess
, and
A.
Neubrand
,
J. Acoust. Soc. Am.
92
,
2980
(
1992
).
20.
G. W. Farnell and E. L. Adler, in Physical Acoustics, edited by W. P. Mason and R. N. Thursten (Academic, New York, 1972), Vol. IX.
21.
M. H. Manghnani, in Advanced Materials 98, 5th NIRIM International Symposium on Advanced Materials, Tsukuba, Japan, 1998, p. 73.
22.
M.
Grimsditch
,
E. S.
Zouboulis
, and
A.
Polian
,
J. Appl. Phys.
76
,
832
(
1994
).
23.
W. C.
Oliver
and
G. M.
Pharr
,
J. Mater. Res.
7
,
1564
(
1992
).
24.
J. B.
Pethica
,
P.
Koidl
,
J.
Gobrecht
, and
C.
Schüler
,
J. Vac. Sci. Technol. A
3
,
2391
(
1985
).
25.
R.
Kuschnereit
,
P.
Hess
,
D.
Albert
, and
W.
Kulisch
,
Thin Solid Films
312
,
66
(
1998
).
26.
J. Philip, P. Hess. T. Feygelson, and J. Butler (unpublished).
This content is only available via PDF.
You do not currently have access to this content.