Rapid progress in the synthesis and processing of materials with structure on nanometer length scales has created a demand for greater scientific understanding of thermal transport in nanoscale devices, individual nanostructures, and nanostructured materials. This review emphasizes developments in experiment, theory, and computation that have occurred in the past ten years and summarizes the present status of the field. Interfaces between materials become increasingly important on small length scales. The thermal conductance of many solid–solid interfaces have been studied experimentally but the range of observed interface properties is much smaller than predicted by simple theory. Classical molecular dynamics simulations are emerging as a powerful tool for calculations of thermal conductance and phonon scattering, and may provide for a lively interplay of experiment and theory in the near term. Fundamental issues remain concerning the correct definitions of temperature in nonequilibrium nanoscale systems. Modern Si microelectronics are now firmly in the nanoscale regime—experiments have demonstrated that the close proximity of interfaces and the extremely small volume of heat dissipation strongly modifies thermal transport, thereby aggravating problems of thermal management. Microelectronic devices are too large to yield to atomic-level simulation in the foreseeable future and, therefore, calculations of thermal transport must rely on solutions of the Boltzmann transport equation; microscopic phonon scattering rates needed for predictive models are, even for Si, poorly known. Low-dimensional nanostructures, such as carbon nanotubes, are predicted to have novel transport properties; the first quantitative experiments of the thermal conductivity of nanotubes have recently been achieved using microfabricated measurement systems. Nanoscale porosity decreases the permittivity of amorphous dielectrics but porosity also strongly decreases the thermal conductivity. The promise of improved thermoelectric materials and problems of thermal management of optoelectronic devices have stimulated extensive studies of semiconductor superlattices; agreement between experiment and theory is generally poor. Advances in measurement methods, e.g., the 3ω method, time-domain thermoreflectance, sources of coherent phonons, microfabricated test structures, and the scanning thermal microscope, are enabling new capabilities for nanoscale thermal metrology.
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15 January 2003
Review Article|
January 15 2003
Nanoscale thermal transport
David G. Cahill;
David G. Cahill
Department of Material Science and Engineering and the Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801
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Wayne K. Ford;
Wayne K. Ford
Intel Corporation, 5200 NE Elam Young Parkway, Hillsboro, Orgeon 97124
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Kenneth E. Goodson;
Kenneth E. Goodson
Department of Mechanical Engineering, Stanford University, Palo Alto, California 94305
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Gerald D. Mahan;
Gerald D. Mahan
Department of Physics, Pennsylvania State University, University Park, Pennsylvania 16802
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Arun Majumdar;
Arun Majumdar
Department of Mechanical Engineering, University of California, Berkeley, California 94720
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Humphrey J. Maris;
Humphrey J. Maris
Department of Physics, Brown University, Providence, Rhode Island 02912
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Roberto Merlin;
Roberto Merlin
Department of Physics, University of Michigan, Ann Arbor, Michigan 48109
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Simon R. Phillpot
Simon R. Phillpot
Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439
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David G. Cahill
Wayne K. Ford
Kenneth E. Goodson
Gerald D. Mahan
Arun Majumdar
Humphrey J. Maris
Roberto Merlin
Simon R. Phillpot
Department of Material Science and Engineering and the Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801
J. Appl. Phys. 93, 793–818 (2003)
Article history
Received:
January 28 2002
Accepted:
August 01 2002
Citation
David G. Cahill, Wayne K. Ford, Kenneth E. Goodson, Gerald D. Mahan, Arun Majumdar, Humphrey J. Maris, Roberto Merlin, Simon R. Phillpot; Nanoscale thermal transport. J. Appl. Phys. 15 January 2003; 93 (2): 793–818. https://doi.org/10.1063/1.1524305
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