Nanomechanical resonators can be fabricated to achieve high natural resonance frequencies, approaching 1 GHz, with quality factors in excess of These resonators are candidates for use as highly selective rf filters and as precision on-chip clocks. Some fundamental and some nonfundamental noise processes will present limits to the performance of such resonators. These include thermomechanical noise, Nyquist–Johnson noise, and adsorption–desorption noise; other important noise sources include those due to thermal fluctuations and defect motion-induced noise. In this article, we develop a self-contained formalism for treating these noise sources, and use it to estimate the impact that these noise processes will have on the noise of a model nanoscale resonator, consisting of a doubly clamped beam of single-crystal Si with a natural resonance frequency of 1 GHz.
Skip Nav Destination
Article navigation
1 September 2002
Research Article|
September 01 2002
Noise processes in nanomechanical resonators
A. N. Cleland;
A. N. Cleland
Department of Physics and iQUEST, University of California at Santa Barbara, Santa Barbara, California 93106
Search for other works by this author on:
M. L. Roukes
M. L. Roukes
Department of Physics, California Institute of Technology, Pasadena, California 91125
Search for other works by this author on:
J. Appl. Phys. 92, 2758–2769 (2002)
Article history
Received:
February 15 2002
Accepted:
June 18 2002
Citation
A. N. Cleland, M. L. Roukes; Noise processes in nanomechanical resonators. J. Appl. Phys. 1 September 2002; 92 (5): 2758–2769. https://doi.org/10.1063/1.1499745
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Citing articles via
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
Selecting alternative metals for advanced interconnects
Jean-Philippe Soulié, Kiroubanand Sankaran, et al.
Defects in semiconductors
Cyrus E. Dreyer, Anderson Janotti, et al.
Related Content
A controllable nanomechanical memory element
Appl. Phys. Lett. (October 2004)
Operation of nanomechanical resonant structures in air
Appl. Phys. Lett. (September 2002)
Nanomechanical mass detection using nonlinear oscillations
Appl. Phys. Lett. (November 2009)
Generation of squeezed states of nanomechanical resonator using three-wave mixing
Appl. Phys. Lett. (March 2008)
Adiabatic embedment of nanomechanical resonators in photonic microring cavities
Appl. Phys. Lett. (June 2010)