We present a detailed study of GaN pillar arrays by atomic force microscopy (AFM), Raman spectroscopy, and photoluminescence (PL) spectroscopy. AFM is used to characterize the shape of the GaN pillars and revealed a large roughness of etched pillar surfaces. Raman scattering spectra of the pillars are well described by angular dispersion of polar optical phonons induced by the three-dimensional shape of the pillar. Additional Raman scattering has been tentatively assigned to the activation of the high frequency silent mode by defects introduced during the ion etching. This result is well correlated with the appearance of donor and acceptor-related PL of the GaN pillars. N vacancy or/and Ga interstitials would be likely candidates for donors in the nonstoichiometric GaN near the surface of the etched pillars.
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1 March 2002
Research Article|
March 01 2002
Raman scattering in GaN pillar arrays
F. Demangeot;
F. Demangeot
Laboratoire de Physique des Solides de Toulouse, UMR 5477 CNRS, IRSAMC-Université Paul Sabatiere, 31062 Toulouse Cédex 04, France
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J. Gleize;
J. Gleize
Laboratoire de Physique des Solides de Toulouse, UMR 5477 CNRS, IRSAMC-Université Paul Sabatiere, 31062 Toulouse Cédex 04, France
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J. Frandon;
J. Frandon
Laboratoire de Physique des Solides de Toulouse, UMR 5477 CNRS, IRSAMC-Université Paul Sabatiere, 31062 Toulouse Cédex 04, France
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M. A. Renucci;
M. A. Renucci
Laboratoire de Physique des Solides de Toulouse, UMR 5477 CNRS, IRSAMC-Université Paul Sabatiere, 31062 Toulouse Cédex 04, France
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M. Kuball;
M. Kuball
H. H. Wills Physics Laboratory, University of Bristol, Bristol BS8 1 TL, United Kingdom
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D. Peyrade;
D. Peyrade
GES Université Montpellier II, pl. E. Bataillon, 34090 Montpellier, France
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L. Manin-Ferlazzo;
L. Manin-Ferlazzo
LPN/CNRS Route de Nozay, 91460 Marcoussis, France
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Y. Chen;
Y. Chen
LPN/CNRS Route de Nozay, 91460 Marcoussis, France
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N. Grandjean
N. Grandjean
CRHEA/CNRS, rue B. Grégory, Sophia Antipolis, 06560 Valbonne, France
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J. Appl. Phys. 91, 2866–2869 (2002)
Article history
Received:
July 23 2001
Accepted:
November 29 2001
Citation
F. Demangeot, J. Gleize, J. Frandon, M. A. Renucci, M. Kuball, D. Peyrade, L. Manin-Ferlazzo, Y. Chen, N. Grandjean; Raman scattering in GaN pillar arrays. J. Appl. Phys. 1 March 2002; 91 (5): 2866–2869. https://doi.org/10.1063/1.1445492
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