The peripheral reverse current in silicon junctions sets the leakage and standby power limits in modern integrated circuits. In order to study its origin more in depth, a detailed analysis of the reverse current through a gated diode is developed here. In particular, it is shown that the study of the reverse current component associated with the thick field oxide under depletion and inversion provides a sensitive tool. In addition, combining the gate bias dependence with the temperature variation of the reverse gated diode current allows us to identify its different components, namely, the diffusion the depletion region generation and the surface generation current density Based on this analysis, it is demonstrated that the peripheral diffusion current shows a remarkable increase with gate bias while for standard diodes an increase with the reverse voltage is revealed. This bias dependence has to be taken into account when studying the activation energy of the diffusion and generation parts of the peripheral current. It is finally demonstrated that the proposed gated-diode analysis of the peripheral diode current is markedly more sensitive than analysis of the standard junctions with a large perimeter.
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1 December 2000
Research Article|
December 01 2000
Peripheral current analysis of silicon junction and gated diodes Available to Purchase
A. Czerwinski;
A. Czerwinski
Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland
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E. Simoen;
E. Simoen
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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A. Poyai;
A. Poyai
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
KU Leuven, Kard. Mercierlaan 94, B-3001 Leuven, Belgium
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C. Claeys
C. Claeys
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
KU Leuven, Kard. Mercierlaan 94, B-3001 Leuven, Belgium
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A. Czerwinski
Institute of Electron Technology, Al. Lotnikow 32/46, 02-668 Warsaw, Poland
E. Simoen
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
A. Poyai
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
KU Leuven, Kard. Mercierlaan 94, B-3001 Leuven, Belgium
C. Claeys
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
KU Leuven, Kard. Mercierlaan 94, B-3001 Leuven, Belgium
J. Appl. Phys. 88, 6506–6514 (2000)
Article history
Received:
March 28 2000
Accepted:
September 18 2000
Citation
A. Czerwinski, E. Simoen, A. Poyai, C. Claeys; Peripheral current analysis of silicon junction and gated diodes. J. Appl. Phys. 1 December 2000; 88 (11): 6506–6514. https://doi.org/10.1063/1.1324691
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