Ion beam deposition techniques have been employed to prepare Cr/CoCrPt bilayers for hard bias applications in giant/anisotropic magnetoresistive recording heads. The bilayers were deposited at different deposition angles, which is defined as the angle between deposition beam direction and substrate plane. The magnetic properties of CoCrPt films, such as coercivity remnant magnetization–thickness product and coercive squareness as a function of CoCrPt layer thickness and deposition angle have been studied and correlated to film microstructures. Typical values of and for a Cr100 Å/CoCrPt490 Å bilayer deposited at 42° are 1580 Oe, 2.90 memu/cm2, and 0.90, respectively. The increase in with increasing CoCrPt layer thickness at a fixed deposition angle is accompanied by a linear decrease in We have observed, however, that for the same bilayer geometry both and of CoCrPt layer increase with decreasing deposition angle, whereas remains almost unchanged. High angle x-ray diffraction measurements indicate that the hexagonal-close-packed crystallographic orientation of CoCrPt films is enhanced with decreasing deposition angles. This suggests that the improvement in both and for CoCrPt films deposited with decreasing deposition angle results from an enhancement in in-plane c-axis texture, and crystallinity. This could be attributed to an enhancement in in-plane adatom mobility at low deposition angles.
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15 April 1999
Research Article|
April 15 1999
Magnetic properties of ion beam deposited CoCrPt hard bias films for magnetoresistive heads Available to Purchase
Q. Leng;
Q. Leng
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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M. Mao;
M. Mao
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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L. Miloslavsky;
L. Miloslavsky
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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B. Simion;
B. Simion
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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C.-Y. Hung;
C.-Y. Hung
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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C. Qian;
C. Qian
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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M. Miller;
M. Miller
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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R. Basi;
R. Basi
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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H. C. Tong;
H. C. Tong
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
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J. Wang;
J. Wang
Veeco Instruments Incorporated, Terminal Drive, Plainview, New York 11803
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H. Hegde
H. Hegde
Veeco Instruments Incorporated, Terminal Drive, Plainview, New York 11803
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Q. Leng
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
M. Mao
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
L. Miloslavsky
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
B. Simion
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
C.-Y. Hung
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
C. Qian
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
M. Miller
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
R. Basi
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
H. C. Tong
Read-Rite Corporation, 44100 Osgood Road, Fremont, California 94539
J. Wang
Veeco Instruments Incorporated, Terminal Drive, Plainview, New York 11803
H. Hegde
Veeco Instruments Incorporated, Terminal Drive, Plainview, New York 11803
J. Appl. Phys. 85, 5843–5845 (1999)
Citation
Q. Leng, M. Mao, L. Miloslavsky, B. Simion, C.-Y. Hung, C. Qian, M. Miller, R. Basi, H. C. Tong, J. Wang, H. Hegde; Magnetic properties of ion beam deposited CoCrPt hard bias films for magnetoresistive heads. J. Appl. Phys. 15 April 1999; 85 (8): 5843–5845. https://doi.org/10.1063/1.369935
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