Ferroelectric capacitors using (SBTN) were compositionally altered varying Nb concentration from 0 to 1, the corresponding and electrical characteristics evaluated from room temperature to 145 °C. These temperature evaluations reveal that the leakage current will increase with larger Nb concentration and the dominant conduction mechanism changes from Schottky to Frenkel–Poole emission. The ferroelectric hysteresis curve shifts in the direction of negative polarization as the temperature or the concentration of Nb increases. Concentration increases in Nb reduces the temperature dependence of remnant polarization and coercive field. Film resistance to imprint and degradation from elevated temperature improves. Substituting b-site Nb for Ta allows imprinted capacitors to recover by application of either bipolar fatigue pulses at room temperature (RT) or, cycling measurement pulses at elevated temperature. Due to this asymmetrical tradeoff of film ferroelectric properties, there is an optimum identifiable range of Nb concentrations (0.25–0.5) capable of achieving memory performance. Optimized SBTN ferroelectric films will suitably perform in integrated circuit memory function applications provided that the leakage current incurred at higher Nb concentrations can be reduced.
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15 December 1998
Research Article|
December 15 1998
Compositional dependence of electrical characteristics of thin-film capacitors Available to Purchase
Akira Furuya;
Akira Furuya
Silicon Systems Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229-1198, Japan
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Joe D. Cuchiaro
Joe D. Cuchiaro
Symetrix Corporation, Colorado Springs, Colorado 80919
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Akira Furuya
Joe D. Cuchiaro
Silicon Systems Research Laboratories, NEC Corporation, Sagamihara, Kanagawa 229-1198, Japan
J. Appl. Phys. 84, 6788–6794 (1998)
Article history
Received:
June 23 1997
Accepted:
September 18 1998
Citation
Akira Furuya, Joe D. Cuchiaro; Compositional dependence of electrical characteristics of thin-film capacitors. J. Appl. Phys. 15 December 1998; 84 (12): 6788–6794. https://doi.org/10.1063/1.369010
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