We have investigated the imprint characteristics of fully integrated ferroelectric lead zirconate titanate based capacitors. These capacitors were fabricated using conducting perovskite La–Sr–Co–O electrodes. We have specifically focused on the effect of several test and capacitor variables, including temperature, unipolar stress amplitude, number of cycles, and device area. Two different figures of merit, one based on coercive voltage changes and the other based on differences in polarization values were used to quantify imprint. The imprint in our capacitors showed a small temperature dependence over the range that we have studied. The unidirectional pulse voltage amplitude had a larger influence on the imprint.
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