The carbidization of thin Ti films on natural diamond has been investigated in the temperature range between room temperature and 700 °C using x-ray-photoelectron-spectroscopy. It is possible to separate chemical phases in Ti 2p3/2 electron peaks after deconvolution of the spectrometer’s broadening function. We employ Bayesian information, using maximum entropy prior information. The apparatus function is derived from measured spectra of the Fermi edge of a silver sample. Data analysis of reconstructed Ti 2p3/2 core level spectra shows that, with increasing temperature, Ti films are transformed from metallic Ti to a mixed phase consisting of metallic Ti and TiC0.56. No carbidic phase is found with a ratio of carbidic C to Ti smaller than 0.56. The metallic layer is fully transformed to TiC0.56 at 430 °C. At higher temperatures, the concentration ratio of carbidic C to Ti depends nearly linearly on temperature.

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