To understand degradation of materials due to ion bombardment in a space plasma environment, polymers of polyimide, polyetheretherketone and perfluoroalkoxy, and glasses coated with MgF2 were exposed to ion beams of oxygen and nitrogen with energy levels ranging from 600 eV to 5 keV. For the polymers, x‐ray photoelectron spectroscopic analysis showed that the addition reaction of oxygen or nitrogen atoms or the disruption or separation of various structural compounds occurred depending on ion energy and dose. For the glass plate, the coating layer of MgF2 was drastically sputtered.

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