CdMgTe/CdTe superlattices with a high degree of structural perfection were grown on CdTe and Cd0.975Zn0.025Te substrates by molecular‐beam epitaxy. The structural properties of the superlattices, i.e., the morphology of the layers and the state of strain relaxation, were examined by transmission electron microscopy and x‐ray diffractometry. High‐resolution transmission electron microscopy (HRTEM) reveals the structural quality of the superlattices on an atomic scale. The width of the chemical transition between the CdTe and CdMgTe layers was determined by HRTEM using chemically sensitive imaging conditions. Two different mechanisms of misfit dislocation generation could be observed insitu in the electron microscope studying a cross‐section specimen of a superlattice which was originally fully strained.

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