Thin films of alternating Au, Ag, and Cu wedge‐shaped metal layers were made by magnetron sputtering in order to develop a method for investigation of a multicomponent systems. X‐ray‐diffraction patterns of all as‐deposited samples revealed satellites in the vicinity of (111) reflections, evidence of composition‐modulated artificial superlattice formation. The experimental spectra are well explained by the kinematical diffraction theory for imperfect superlattices. Computer simulations have demonstrated extremely high sensitivity to the fluctuations ΔH/H of the superlattice period H. As a result, a rapid and simple method of ΔH/H determination is proposed.
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