The ablation and patterning of Y–Ba–Cu–O films on (100) SrTiO3 and (100) MgO substrates by KrF excimer‐laser light projection was investigated. Three different regimes of laser‐material interactions were observed. Transition temperatures and critical current densities in laser‐fabricated strip lines were investigated.

1.
D. Bäuerle, Chemical Processing with Lasers, Springer Series in Materials Science, Vol. 1 (Springer, Heidelberg, 1986).
2.
M.
Eyett
,
D.
Bäuerle
,
W.
Wersing
, and
H.
Thomann
,
J. Appl. Phys.
62
,
1511
(
1987
).
3.
M.
Eyett
and
D.
Bäuerle
,
Appl. Phys. Lett.
51
,
2054
(
1987
).
4.
A.
Inam
,
X. D.
Wu
,
T.
Venkatesan
,
S. B.
Ogale
,
C. C.
Chang
, and
D.
Dijkkamp
,
Appl. Phys. Lett.
51
,
1112
(
1987
);
M.
Scheuermann
,
C. C.
Chi
,
C. C.
Tsuei
,
D. S.
Yee
,
J. J.
Cuomo
,
R. B.
Laibowitz
,
R. H.
Koch
,
B.
Braren
,
R.
Srinivasan
, and
M. M.
Plechaty
,
Appl. Phys. Lett.
51
,
1951
(
1987
).,
Appl. Phys. Lett.
5.
D.
Bäuerle
,
Appl. Phys. A
48
,
527
(
1989
).
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