An ion beam with different incident energies E was used to analyze a 500‐Å‐thick In0.25Ga0.75As strained epitaxial film grown on GaAs (100) by molecular beam epitaxy. Ion channeling angular scans about 〈110〉 axis were carried out in (100) plane. When E is 5.8 MeV, the angular misalignment between 〈110〉 channels of the top layer and the substrate was 0.90°. We can calculate the planar strain of the epilayer, which is 1.62%. When incident ion energy was decreased, anomalous phemomena were observed in the angular scan profiles of the substrate. When E is 3.0 MeV, a serious asymmetry appeared in axial scan profile of the substrate; When E is 1.2 MeV, the angular misalignment reduced to 0.60°, and the critical angle for channeling of the substrate is 1.25° which is much larger than that of the epilayer, 0.95°. The physical mechanism giving rise to these phenomena is discussed, and the causes and conditions for these phenomena taking place were pointed out.

1.
S. T.
Picraux
,
W. K.
Chu
,
W. R.
Allen
, and
J. A.
Ellison
,
Nucl. Instrum. Methods B
15
,
306
(
1986
).
2.
W. K.
Chu
,
F. W.
Saris
,
C.‐A.
Chang
,
R.
Ludeke
, and
L.
Esaki
,
Phys. Rev. B
26
,
1999
(
1982
).
3.
C. K.
Pan
,
D. C.
Zheng
,
T. G.
Finstad
,
W. K.
Chu
,
V. S.
Speriosu
,
M. A.
Nicolet
, and
J. H.
Barrett
,
Phys. Rev. B
31
,
1270
(
1985
).
4.
A. T.
Fiory
,
J. C.
Bean
,
L. C.
Feldman
, and
I. K.
Robinson
,
J. Appl. Phys.
56
,
1227
(
1984
).
5.
Shin
Hashimoto
,
Y.‐O.
Feng
,
W. M.
Gibson
,
L. J.
Schowalter
, and
B. D.
Hunt
,
Nucl. Instrum. Methods B
13
,
45
(
1986
).
6.
B. A.
Davidson
,
L. C.
Feldman
,
J.
Bevk
, and
J. P.
Mannaerts
,
Appl. Phys. Lett.
50
,
135
(
1987
).
7.
J. L. E.
Stevens
,
B. J.
Robinson
,
J. A.
Davies
,
D. A.
Thompson
, and
T. E.
Jackman
,
J. Appl. Phys.
65
,
1510
(
1989
).
8.
Because of quasioscillatory feature of channeling, it will approach equilibrium in a short distance λe. So nλ<λe,λe is equilibrium length. (See Ref. 6.)
9.
S. T.
Picraux
,
G. W.
Arnold
,
D. R.
Myers
,
L. R.
Dawson
,
R. M.
Biefeld
,
I. J.
Fritz
, and
T. E.
Zipperian
,
Nucl. Instrum. Methods B
7/8
,
453
(
1985
).
10.
Shiduan
Yin
,
Chunwu
Wu
,
Jingping
Zhang
,
Jiarui
Liu
,
Peiran
Zhu
, and
Yu
Wang
,
Solid‐State Commun.
65
,
1181
(
1988
).
This content is only available via PDF.
You do not currently have access to this content.