The photothermal laser‐induced chemical vapor deposition of copper is studied as a function of the writing speed, the light intensity, and the diameter of the focal spot on the substrate, at three different pressures of the copperbishexafluoroacetylacetonate precursor. The height, the width, and the electrical conductivity of the deposited metal stripes are measured. The metalorganic vapor pressure is the key variable for attaining high writing speeds. Copper stripes have been obtained at 1 mm s−1 .

1.
D. Bäuerle, Chemical Processing with Lasers, Springer Series in Materials Science No. 1 (Springer, Berlin, 1986).
2.
D. J.
Ehrlich
and
J. Y.
Tsao
,
J. Vac. Sci. Technol. B
1
,
969
(
1983
).
3.
R. M.
Osgood
, Jr.
,
Ann. Rev. Phys. Chem.
34
,
77
(
1983
).
4.
D. Braichotte and H. van den Bergfa, Integrated Optics, edited by H. P. Nolting and R. Ulrich, Springer Series in Opical Science No. 48 (Springer, Berlin, 1985), p. 38.
5.
F. A.
Houle
,
C. R.
Jones
,
T.
Baum
,
C.
Pico
, and
C. A.
Kovac
,
Appl. Phys. Lett.
46
,
204
(
1985
).
6.
C. R.
Jones
,
F. A.
Houle
,
C. A.
Kovac
, and
T. H.
Baum
,
Appl. Phys. Lett.
46
,
97
(
1985
).
7.
D.
Braichotte
and
H.
van den Bergh
,
Appl. Phys. A
44
,
353
(
1987
).
8.
C.
Garrido‐Suarez
,
D.
Braichotte
, and
H.
van den Bergh
,
Appl. Phys. A
46
,
285
(
1988
);
D. Braichotte and H. van den Bergh, Laser Processing and Diagnostics, edited by D. Bäuerle, K. Kompa, and L. Laude (Les Editions de Physique, Les Ulis, France, 1986), p. 95.
9.
D.
Braichotte
and
H.
van den Bergh
,
Appl. Phys. A
45
,
337
(
1988
).
10.
R. L.
Belford
,
A. E.
Martell
, and
M.
Calvin
,
J. Inorg. Nucl. Chem.
2
,
11
(
1956
).
11.
G.
Leyendecker
,
D.
Bäuerle
,
P.
Geittner
, and
H.
Lydtin
,
Appl. Phys. Lett.
39
,
921
(
1981
).
12.
M.
Qiu
,
R.
Monot
, and
H.
van den Bergh
,
Sci. Sin. A
27
,
531
(
1984
).
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