Spatially and time‐resolved detection of gallium atoms formed in the excimer‐laser photochemical vapor deposition (CVD) process of trimethylgallium at 248 nm was made by the laser‐induced fluorescence technique. The result shows the importance of chemically adsorbed species in the photo‐CVD process. The presence of a thermally assisted effect in the photochemical decomposition was indicated.

1.
For reviews see, for example, (a)
B. J.
Ehrlich
and
J. Y.
Tsao
,
J. Vac. Sci. Technol. B
1
,
969
(
1983
);
(b)
R. M.
Osgood
, Jr.
,
Ann. Rev. Phys. Chem.
34
,
77
(
1983
);
and (c) J. T. Yardley, in Laser Handbook, edited by M. Bass and M. L. Stich (North‐Holland, Amsterdam, 1985), Vol. 5, p. 405.
2.
D. J.
Ehrlich
,
R. M.
Osgood
, Jr.
, and
T. F.
Deutsch
,
J. Vac. Sci. Technol.
21
,
23
(
1982
).
3.
G. S.
Higashi
,
L. J.
Rothberg
, and
C. G.
Fleming
,
Chem. Phys. Lett.
115
,
167
(
1985
).
4.
G. S.
Higashi
and
L. J.
Rothberg
,
Appl. Phys. Lett.
47
,
1288
(
1985
).
5.
R. M.
Roth
,
K. G.
Spears
, and
G.
Wong
,
Appl. Phys. Lett.
45
,
28
(
1984
).
6.
S. A.
Mitchell
,
P. A.
Hackett
,
D. M.
Rayner
, and
M. R.
Humphries
,
J. Chem. Phys.
83
,
5028
(
1985
).
This content is only available via PDF.
You do not currently have access to this content.