A modified version of the atomic force microscope is introduced that enables a precise measurement of the force between a tip and a sample over a tip‐sample distance range of 30–150 Å. As an application, the force signal is used to maintain the tip‐sample spacing constant, so that profiling can be achieved with a spatial resolution of 50 Å. A second scheme allows the simultaneous measurement of force and surface profile; this scheme has been used to obtain material‐dependent information from surfaces of electronic materials.

1.
J. N. Israelaehvili, Intermolecular and Surface Forces (Academic, London, 1985).
2.
D. Henderson, J. Colloid Interface Sci. (to be published).
3.
G.
Binnig
and
H.
Rohrer
,
Sci. Am.
253
,
50
(
1985
).
4.
D. W.
Pohl
,
W.
Denk
, and
U.
Duerig
,
J. Appl. Phys.
59
,
3318
(
1986
).
5.
G.
Binnig
,
C. F.
Quate
, and
Ch.
Gerber
,
Phys. Rev. Lett.
56
,
930
(
1986
).
6.
J. M.
Soler
,
A. M.
Baro
,
N.
Garcia
, and
H.
Rohrer
,
Phys. Rev. Lett.
57
,
444
(
1986
).
7.
U.
Durig
,
J. K.
Gimzewski
,
D. W.
Pohl
, and
R.
Schlittler
,
Phys. Rev. Lett.
57
,
2403
(
1986
).
8.
G. M. McClelland, R. Erlandsson, and S. Chiang, Review of Progress in Quantitative Non‐Destructive Evaluation (Plenum, New York), Vol. 6 (to be published).
9.
D. Royer, E. Dieulesaint, and Y. Martin, in Proceedings of IEEE Ultrasonics Symposium at San Francisco, edited by B. R. McAvoy (IEEE, New York, 1985), p. 432.
10.
R. M.
DeLaRue
,
R. F.
Humphryes
,
I. M.
Mason
, and
E. A.
Ash
,
Proc. IEEE
119
,
117
(
1972
).
11.
C. C.
Williams
and
H. K.
Wickramasinghe
,
Appl. Phys. Lett.
49
,
1587
(
1986
).
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