Infrared (IR) absorption and Raman spectra are measured for glow‐discharge‐produced, wide‐optical‐gap binary Si:H alloys containing a number of polysilane (SiH2)n groups (polysilane alloys). The highly resolved IR stretching band revealed double peaks, at 2100 and 2122 cm−1, which correspond to an exterior SiH2 and an interior SiH2, respectively, in a 3/4 Si(SiH2)nSi 3/4 group. This result provides evidence for the existence of (SiH2)n (n≥3) groups. Nonlinearity of the (SiH2)n wagging absorption strength with the number of SiH2 units in the alloy is observed in the IR spectra. This is related to a change in the polymerization degree of a (SiH2)n chain. Raman scattering intensity in the 50–400 cm−1 range is lower than that for conventional hydrogenated amorphous silicon alloys, suggesting a reduction in the number of Si loops arising from (SiH2)n chain formations. The change in the polymerization degree as a function of substrate temperature during deposition and the annealing temperature are also discussed.
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15 December 1985
Research Article|
December 15 1985
Vibrational spectra of polysilane alloys Available to Purchase
Shoji Furukawa;
Shoji Furukawa
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
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Nobuo Matsumoto;
Nobuo Matsumoto
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
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Takeshi Toriyama;
Takeshi Toriyama
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
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Norikuni Yabumoto
Norikuni Yabumoto
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
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Shoji Furukawa
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
Nobuo Matsumoto
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
Takeshi Toriyama
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
Norikuni Yabumoto
NTT Musashino Electrical Communication Laboratories, Musashino‐shi, Tokyo 180, Japan
J. Appl. Phys. 58, 4658–4661 (1985)
Article history
Received:
April 22 1985
Accepted:
September 04 1985
Citation
Shoji Furukawa, Nobuo Matsumoto, Takeshi Toriyama, Norikuni Yabumoto; Vibrational spectra of polysilane alloys. J. Appl. Phys. 15 December 1985; 58 (12): 4658–4661. https://doi.org/10.1063/1.336238
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