A sample with the configuration Si (111)/single crystalline Pd2Si/polycrystalline Pd2Si/Pd is used to study the dominant moving species during subsequent Pd2Si formation by annealing at 275 °C. The interface between monocrystalline and polycrystalline Pd2Si is used as a marker to monitor the dominant moving species. The result shows that Pd is the dominant moving species in the monocrystal. off
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By “moving species” we mean the species that moves with respect to an inert marker (see Ref. 2).
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By “inert marker” we mean that a marker is fixed to the silicide lattice during the reaction and that does not interfere with the reaction processes.
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© 1985 American Institute of Physics.
1985
American Institute of Physics
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