We have synthesized, by rf sputtering, Pd/Au layered structures with periodicities (Pd+Au layers) that vary from 15–95 Å. The films have been characterized by x‐ray diffraction. The individual metal layers have (111) orientation perpendicular to the plane of the film. We accurately model the positions and intensities of x‐ray lines by a one‐dimensional diffraction grating of Pd and Au layers and relate the observed x‐ray line widths to loss of long‐range layer coherence induced by dislocations at Pd–Au interfaces. We also find that the in‐plane electrical resistivity of the films varies inversely, and the temperature coefficient of resistance directly with the layer period. We account for both of these trends by considering scattering of electrons from the metal interfaces, using a modified Fuchs theory.
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April 1983
Research Article|
April 01 1983
Properties of Pd/Au thin film layered structures Available to Purchase
P. F. Carcia;
P. F. Carcia
Central Research and Development Department, Experimental Station, E. I. du Pont de Nemours and Company, Wilmington, Delaware 19898
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A. Suna
A. Suna
Central Research and Development Department, Experimental Station, E. I. du Pont de Nemours and Company, Wilmington, Delaware 19898
Search for other works by this author on:
P. F. Carcia
Central Research and Development Department, Experimental Station, E. I. du Pont de Nemours and Company, Wilmington, Delaware 19898
A. Suna
Central Research and Development Department, Experimental Station, E. I. du Pont de Nemours and Company, Wilmington, Delaware 19898
J. Appl. Phys. 54, 2000–2005 (1983)
Article history
Received:
September 27 1982
Accepted:
December 01 1982
Citation
P. F. Carcia, A. Suna; Properties of Pd/Au thin film layered structures. J. Appl. Phys. 1 April 1983; 54 (4): 2000–2005. https://doi.org/10.1063/1.332214
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