Structural integrity and robustness are key parameters to evaluate microfabrication techniques. Bending and collapsing of 2D/3D microstructures are commonly noted in solvent-involved procedures, e.g., liquid-based post-treatment in wet-etching, lithography, and Two Photon Polymerizations (TPPs). Such structural failures are caused by excessive solution-imposed capillary forces, where multiple kinds of liquids may intensively participate. Current pieces of the literature focus on the mechanical one-axis models to illustrate their deformation process. To date, there exists an emerging demand for dual-axis models to satisfy rapidly developed micro/nano-engineerings. Here, utilizing polymer micro-pillars distributed in a square array as an illustration example, a dual-axis beam-sway model is proposed considering the influences of structure arrangement as well as the solvent. Specifically, a simplified criterion for judging structural stability is identified. For verifications, the TPP-based experimental data show excellent consistency with model predictions. All in all, the extended model offers reliable guidance for the fabrication of delicate structures and further benefits the optimization of related microfabrication processes.
Skip Nav Destination
Article navigation
7 October 2023
Research Article|
October 04 2023
A dual-axis mechanical model for analyzing the capillary-force-induced clustering on periodic structures
Xinggang Shang
;
Xinggang Shang
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Validation, Writing – original draft, Writing – review & editing)
1
College of Optical Science and Engineering, Zhejiang University
, Hangzhou, Zhejiang, China
2
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
3
Institute of Advanced Technology, Westlake Institute for Advanced Study
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
Search for other works by this author on:
Ning Wang
;
Ning Wang
a)
(Conceptualization, Formal analysis, Funding acquisition, Project administration, Supervision, Writing – review & editing)
4
Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences
, Hangzhou, Zhejiang, China
5
Laboratory of Gravitational Wave Precision Measurement of Zhejiang Province
, No.1, Sub-Lane Xiangshan, Xihu District, Hangzhou, Zhejiang, China
6
Taiji Laboratory for Gravitational Wave Universe
, No.1, Sub-Lane Xiangshan, Xihu District, Hangzhou, Zhejiang, China
a)Authors to whom correspondence should be addressed: [email protected], [email protected], and [email protected]
Search for other works by this author on:
Nanjia Zhou;
Nanjia Zhou
a)
(Funding acquisition, Supervision)
2
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
3
Institute of Advanced Technology, Westlake Institute for Advanced Study
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
a)Authors to whom correspondence should be addressed: [email protected], [email protected], and [email protected]
Search for other works by this author on:
Min Qiu
Min Qiu
a)
(Funding acquisition, Supervision)
2
Key Laboratory of 3D Micro/Nano Fabrication and Characterization of Zhejiang Province, School of Engineering, Westlake University
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
3
Institute of Advanced Technology, Westlake Institute for Advanced Study
, 18 Shilongshan Road, Hangzhou, Zhejiang, China
a)Authors to whom correspondence should be addressed: [email protected], [email protected], and [email protected]
Search for other works by this author on:
a)Authors to whom correspondence should be addressed: [email protected], [email protected], and [email protected]
J. Appl. Phys. 134, 133105 (2023)
Article history
Received:
July 05 2023
Accepted:
September 20 2023
Citation
Xinggang Shang, Ning Wang, Nanjia Zhou, Min Qiu; A dual-axis mechanical model for analyzing the capillary-force-induced clustering on periodic structures. J. Appl. Phys. 7 October 2023; 134 (13): 133105. https://doi.org/10.1063/5.0165881
Download citation file:
Pay-Per-View Access
$40.00
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
278
Views
Citing articles via
A step-by-step guide to perform x-ray photoelectron spectroscopy
Grzegorz Greczynski, Lars Hultman
Scaling effects on the microstructure and thermomechanical response of through silicon vias (TSVs)
Shuhang Lyu, Thomas Beechem, et al.