Uniformly acceptor doped Pb(Zr0.48Ti0.52)O3 (PZT) films with 2 mol. % Mg or Fe prepared by chemical solution deposition exhibited decreased dielectric constants and remanent polarizations relative to undoped PZT. For highly accelerated lifetime testing (HALT) at 200 °C and an electric field of 300 kV/cm in the field up direction, the HALT lifetimes (t50) for undoped, Mg-doped, and Fe-doped PZT films were shortened from 2.81 ± 0.1 to 0.21 ± 0.1 and 0.54 ± 0.04 h, respectively. Through thermally stimulated depolarization current measurement, significant electromigration was found in homogeneously Mg-doped PZT thin films, a major factor in their short HALT lifetime. Because the concentration of oxygen vacancies increases with uniform acceptor doping, the lifetime decreases. In contrast, when a thin layer of Mg-doped or Fe-doped PZT was deposited on undoped PZT or Nb-doped PZT (PNZT), the HALT lifetimes were longer than those of pure PZT or PNZT films. This confirms prior work on PNZT films with a Mn-doped top layer, demonstrating that the HALT lifetime increases for composite films when a layer with multivalent acceptors is present near the negative electrode during HALT. In that case, the compensating electrons are trapped, presumably on the multivalent acceptors, thus increasing the lifetime.
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7 November 2022
Research Article|
November 04 2022
Effect of Mg-doping and Fe-doping in lead zirconate titanate (PZT) thin films on electrical reliability
Dongjoo Koh
;
Dongjoo Koh
a)
(Conceptualization, Data curation, Formal analysis, Investigation, Methodology, Validation, Visualization, Writing – original draft)
1
Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University
, State College, Pennsylvania 16802, USA
a)Author to whom correspondence should be addressed: rhehdwn00@gmail.com
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Song Won Ko
;
Song Won Ko
(Conceptualization, Formal analysis, Investigation, Methodology, Project administration, Supervision, Writing – review & editing)
2
KOTECH LLC,
State College, Pennsylvania 16801, USA
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Jung In Yang;
Jung In Yang
(Formal analysis, Investigation, Methodology, Project administration, Resources, Software, Supervision, Writing – review & editing)
1
Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University
, State College, Pennsylvania 16802, USA
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Betul Akkopru-Akgun
;
Betul Akkopru-Akgun
(Formal analysis, Investigation, Methodology, Resources, Software, Supervision, Writing – review & editing)
1
Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University
, State College, Pennsylvania 16802, USA
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Susan Trolier-McKinstry
Susan Trolier-McKinstry
(Conceptualization, Funding acquisition, Investigation, Methodology, Project administration, Resources, Supervision, Writing – review & editing)
1
Department of Materials Science and Engineering and Materials Research Institute, Pennsylvania State University
, State College, Pennsylvania 16802, USA
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a)Author to whom correspondence should be addressed: rhehdwn00@gmail.com
J. Appl. Phys. 132, 174101 (2022)
Article history
Received:
May 31 2022
Accepted:
October 08 2022
Citation
Dongjoo Koh, Song Won Ko, Jung In Yang, Betul Akkopru-Akgun, Susan Trolier-McKinstry; Effect of Mg-doping and Fe-doping in lead zirconate titanate (PZT) thin films on electrical reliability. J. Appl. Phys. 7 November 2022; 132 (17): 174101. https://doi.org/10.1063/5.0101308
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