The nitrogen-vacancy (NV) centers in diamond have been applied to scanning magnetometer probes combined with atomic force microscopy (AFM) to demonstrate nanometer-scale magnetic sensing and imaging. However, the scanning diamond NV center probe fabrication requires complicated processes including electron-beam lithography and photolithography. In this study, we introduce an alternative method to fabricate a scanning NV probe using laser cutting and focused ion beam (FIB) milling from a bulk diamond hosting an ensemble of NV centers. A few tens of micrometer-sized diamond pieces, cut by laser processing, were attached to the probe end of a quartz tuning-fork-based AFM. Then, it was fabricated into a few-micrometer-sized diamond NV center probe by using a donut-shaped milling pattern in the FIB processing to avoid damage to the diamond probe surface to degrade the NV− charged state at the tip apex. By using a home-built scanning NV magnetometer probe microscopy setup, an optically detected magnetic resonance was measured to detect stray magnetic fields demonstrating the imaging of a magnetic structure of approximately 5-μm periodicity from a magnetic tape. This study offers a method with a higher degree of probe-shape control for scanning NV probe that will broaden its application capabilities.
Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling
Yuta Kainuma, Kunitaka Hayashi, Chiyaka Tachioka, Mayumi Ito, Toshiharu Makino, Norikazu Mizuochi, Toshu An; Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling. J. Appl. Phys. 28 December 2021; 130 (24): 243903. https://doi.org/10.1063/5.0072973
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