The nitrogen-vacancy (NV) centers in diamond have been applied to scanning magnetometer probes combined with atomic force microscopy (AFM) to demonstrate nanometer-scale magnetic sensing and imaging. However, the scanning diamond NV center probe fabrication requires complicated processes including electron-beam lithography and photolithography. In this study, we introduce an alternative method to fabricate a scanning NV probe using laser cutting and focused ion beam (FIB) milling from a bulk diamond hosting an ensemble of NV centers. A few tens of micrometer-sized diamond pieces, cut by laser processing, were attached to the probe end of a quartz tuning-fork-based AFM. Then, it was fabricated into a few-micrometer-sized diamond NV center probe by using a donut-shaped milling pattern in the FIB processing to avoid damage to the diamond probe surface to degrade the NV− charged state at the tip apex. By using a home-built scanning NV magnetometer probe microscopy setup, an optically detected magnetic resonance was measured to detect stray magnetic fields demonstrating the imaging of a magnetic structure of approximately 5-μm periodicity from a magnetic tape. This study offers a method with a higher degree of probe-shape control for scanning NV probe that will broaden its application capabilities.
Skip Nav Destination
Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling
CHORUS
Article navigation
28 December 2021
Research Article|
December 28 2021
Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling
Yuta Kainuma
;
Yuta Kainuma
a)
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, Nomi, Ishikawa 923-1292, Japan
a)Author to whom correspondence should be addressed: yuta.kaichan@jaist.ac.jp
Search for other works by this author on:
Kunitaka Hayashi;
Kunitaka Hayashi
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, Nomi, Ishikawa 923-1292, Japan
Search for other works by this author on:
Chiyaka Tachioka;
Chiyaka Tachioka
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, Nomi, Ishikawa 923-1292, Japan
Search for other works by this author on:
Mayumi Ito;
Mayumi Ito
2
Industrial Collaboration Promotion Center, Japan Advanced Institute of Science and Technology
, Nomi, Ishikawa 923-1292, Japan
Search for other works by this author on:
Toshiharu Makino;
Toshiharu Makino
3
National Institute of Advanced Industrial Science and Technology
, Tsukuba, Ibaraki 305-8568, Japan
Search for other works by this author on:
Norikazu Mizuochi
;
Norikazu Mizuochi
4
Institute for Chemical Research, Kyoto University
, Gokasho, Uji, Kyoto 611-0011, Japan
Search for other works by this author on:
Toshu An
Toshu An
1
School of Materials Science, Japan Advanced Institute of Science and Technology
, Nomi, Ishikawa 923-1292, Japan
Search for other works by this author on:
a)Author to whom correspondence should be addressed: yuta.kaichan@jaist.ac.jp
J. Appl. Phys. 130, 243903 (2021)
Article history
Received:
September 26 2021
Accepted:
December 06 2021
Citation
Yuta Kainuma, Kunitaka Hayashi, Chiyaka Tachioka, Mayumi Ito, Toshiharu Makino, Norikazu Mizuochi, Toshu An; Scanning diamond NV center magnetometer probe fabricated by laser cutting and focused ion beam milling. J. Appl. Phys. 28 December 2021; 130 (24): 243903. https://doi.org/10.1063/5.0072973
Download citation file:
Sign in
Don't already have an account? Register
Sign In
You could not be signed in. Please check your credentials and make sure you have an active account and try again.
Sign in via your Institution
Sign in via your InstitutionPay-Per-View Access
$40.00
1,651
Views