Tin and silicon incorporate on gallium sites in GaO and act as shallow donors. The monoclinic structure of GaO has two inequivalent Ga sites; density functional theory calculations for bulk show that Sn prefers the octahedral site, while Si prefers the tetrahedral site. Experiments have indicated that Si and Sn can also incorporate on the thermodynamically less preferred site. We use density functional theory to study the adsorption of Si and Sn and also the co-adsorption of these impurities with Ga and O adatoms on the GaO(010) surface. We identify a number of surface reconstructions in which Si adatoms prefer octahedral sites and Sn adatoms prefer tetrahedral sites. By applying the electron counting rule, we also study the mechanisms of the preferred adsorption sites for Si and Sn. We conclude that Si and Sn can also occupy the thermodynamically unfavored site due to surface reconstructions during the growth, which potentially leads to Si and Sn occupying both octahedral and tetrahedral sites in GaO.
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14 November 2021
Research Article|
November 12 2021
Incorporation of Si and Sn donors in β-Ga2O3 through surface reconstructions
Special Collection:
Wide Bandgap Semiconductor Materials and Devices
Mengen Wang
;
Mengen Wang
Materials Department, University of California, Santa Barbara
, Santa Barbara, California 93106-5050, USA
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Sai Mu
;
Sai Mu
Materials Department, University of California, Santa Barbara
, Santa Barbara, California 93106-5050, USA
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Chris G. Van de Walle
Chris G. Van de Walle
a)
Materials Department, University of California, Santa Barbara
, Santa Barbara, California 93106-5050, USA
a)Author to whom correspondence should be addressed: [email protected]
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a)Author to whom correspondence should be addressed: [email protected]
Note: This paper is part of the Special Topic on Wide Bandgap Semiconductor Materials and Devices.
J. Appl. Phys. 130, 185703 (2021)
Article history
Received:
August 27 2021
Accepted:
October 18 2021
Citation
Mengen Wang, Sai Mu, Chris G. Van de Walle; Incorporation of Si and Sn donors in β-Ga2O3 through surface reconstructions. J. Appl. Phys. 14 November 2021; 130 (18): 185703. https://doi.org/10.1063/5.0068875
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