We investigated the cavity facet degradation of unsealed GaN-based laser diodes (LDs). It was found that the decrease of optical output power accompanied by undulation for unsealed LDs is related to the facet degradation. Deposits containing Ga, Al, Si, and O were observed on the LD facet for the first time, explaining the reason for the degradation behavior. Considering the shorter wavelength of GaN-based laser diodes, we propose that the splitting of water molecules induced by high-energy photons triggers the oxidation of the facets and the deposition of SiO2. The shape of the deposits is closely correlated with the field distribution on the facet, influencing the LDs’ output power. Improving the tightness of the package is necessary to avoid the fast degradation of GaN-based LDs.

1.
M.
Ikeda
and
S.
Uchida
, “
Blue-violet laser diodes suitable for Blu-ray disk
,”
Phys. Status Solidi A
194
(
2
),
407
(
2002
).
2.
U.
Steegmüller
,
M.
Kühnelt
,
H.
Unold
,
T.
Schwarz
,
R.
Schulz
,
C.
Walter
,
S.
Illek
,
I.
Pietzonka
,
H.
Lindberg
,
M.
Schmitt
, and
U.
Strauss
, “
Green laser modules to fit laser projection out of the pocket
,”
Proc. SPIE
6871
,
687117
(
2008
).
3.
T.
Hoefer
,
M.
Schmitt
,
T.
Schwarz
,
M.
Kuehnelt
,
R.
Schulz
,
I.
Pietzonka
,
H.
Lindberg
,
C.
Lauer
,
S.
Lutgen
,
U.
Steegmüller
, and
U.
Strauss
, “
High performance at low costs: The challenge of manufacturing frequency doubled green semiconductor lasers for mass markets
,”
Proc. SPIE
7583
,
75830T
(
2010
).
4.
D.
Zhao
, “
III-nitride based ultraviolet laser diodes
,”
J. Semicond.
40
,
120402
(
2019
).
5.
A.
Balck
,
M.
Baumann
,
J.
Malchus
,
R. V.
Chacko
,
S.
Marfels
,
U.
Witte
,
D.
Dinakaran
,
S.
Ocylok
,
M.
Weinbach
,
C.
Bachert
,
A.
Kösters
,
V.
Krause
,
H.
König
,
A.
Lell
,
B.
Stojetz
,
A.
Löffler
, and
U.
Strauss
, “
700 w blue fiber-coupled diode-laser emitting at 450nm
,”
Proc. SPIE
10514
,
1051403
(
2018
).
6.
L.
Marona
,
P.
Wisniewski
,
P.
Prystawko
,
I.
Grzegory
,
T.
Suski
,
S.
Porowski
,
P.
Perlin
,
R.
Czernecki
, and
M.
Leszczyński
, “
Degradation mechanisms in InGaN laser diodes grown on bulk GaN crystals
,”
Appl. Phys. Lett.
88
,
201111
(
2006
).
7.
M.
Takeya
,
T.
Mizuno
,
T.
Sasaki
,
S.
Ikeda
,
T.
Fujimoto
,
Y.
Ohfuji
,
K.
Oikawa
,
Y.
Yabuki
,
S.
Uchida
, and
M.
Ikeda
, “
Degradation in AlGaInN lasers
,”
Phys. Status Solidi C
0
(
7
),
2292
2295
(
2003
).
8.
M.
Meneghini
,
S.
Carraro
,
G.
Meneghesso
,
N.
Trivellin
,
G.
Mura
,
F.
Rossi
,
G.
Salviati
,
K.
Holc
,
T.
Weig
,
L.
Schade
,
M. A.
Karunakaran
,
J.
Wagner
,
U. T.
Schwarz
, and
E.
Zanoni
, “
Degradation of InGaN/GaN laser diodes investigated by micro-cathodoluminescence and micro-photoluminescence
,”
Appl. Phys. Lett.
103
,
233506
(
2013
).
9.
F.
Manyakhin
,
A.
Kovalev
, and
A. E.
Yunovich
,
MRS Internet J. Nitride Semicond. Res.
53
(
3
),
16
(
1998
).
10.
H. K.
Cho
,
F. A.
Khan
,
I.
Adesida
,
Z.-Q.
Fang
, and
D. C.
Look
, “
Deep level characteristics in n-GaN with inductively coupled plasma damage
,”
J. Phys. D: Appl. Phys.
41
,
155314
(
2008
).
11.
M.
Meneghini
,
C.
de Santi
,
N.
Trivellin
,
K.
Orita
,
S.
Takigawa
,
T.
Tanaka
,
D.
Ueda
,
G.
Meneghesso
, and
E.
Zanoni
, “
Investigation of the deep level involved in InGaN laser degradation by deep level transient spectroscopy
,”
Appl. Phys. Lett.
99
,
093506
(
2011
).
12.
C. D.
Santi
,
A.
Caria
,
N.
Renso
,
E.
Dogmus
,
M.
Zegaoui
,
F.
Medjdoub
,
G.
Meneghesso
,
E.
Zanoni
, and
M.
Meneghini
, “
Evidence of optically induced degradation in gallium nitride optoelectronic devices
,”
Appl. Phys. Express
11
,
111002
(
2018
).
13.
L.
Marona
,
P.
Wiśniewski
,
M.
Leszczyński
,
I.
Grzegory
,
T.
Suski
,
S.
Porowski
,
R.
Czernecki
,
A.
Czerwinski
,
M.
Pluska
,
J.
Ratajczak
, and
P.
Perlin
, “
Why InGaN laser-diode degradation is accompanied by the improvement of its thermal stability
,”
Proc. SPIE
6894
,
68940R
(
2008
).
14.
J. W.
Tomm
,
M.
Ziegler
,
M.
Hempel
, and
T.
Elsaesser
, “
Mechanisms and fast kinetics of the catastrophic optical damage (COD) in GaAs-based diode lasers
,”
Laser Photonics Rev.
5
(
3
),
422
441
(
2011
).
15.
G.
Mura
,
M.
Vanzi
,
M.
Hempe
, and
J. W.
Tomm
, “
Analysis of GaN based high-power diode lasers after singular degradation events
,”
Phys. Status Solidi RRL
11
(
7
),
1700132
(
2017
).
16.
J. W.
Tomm
,
R.
Kernke
,
A.
Löffler
,
B.
Stojetz
,
A.
Lell
, and
H.
König
, “
Defect evolution during catastrophic optical damage in 450-nm emitting InGaN/GaN diode lasers
,”
Proc. SPIE
10553
,
1055308
(
2018
).
17.
U.
Strauss
,
A.
Somers
,
U.
Heine
,
T.
Wurm
,
M.
Peter
,
C.
Eichler
,
S.
Gerhard
,
G.
Bruederl
,
S.
Tautz
,
B.
Stojetz
,
A.
Loeffler
, and
H.
Koenig
, “
GaInN laser diodes from 440 to 530nm: A performance study on single-mode and multi-mode R&D designs
,”
Proc. SPIE
10123
,
101230A
(
2017
).
18.
C. C.
Kim
,
Y.
Choi
,
Y. H.
Jang
,
M. K.
Kang
,
M.
Joo
, and
M. S.
Noh
, “
Degradation modes of high power InGaN/GaN laser diodes on low-defect GaN substrates
,”
Proc. SPIE
6894
,
689400
689401
(
2008
).
19.
M.
Okayasu
,
M.
Fukuda
,
T.
Takeshita
,
S.
Uehara
, and
K.
Kurumada
, “
Facet oxidation of InGaAs/GaAs strained quantum-well lasers
,”
J. Appl. Phys.
69
,
8346
(
1991
).
20.
J.
Park
and
D.-S.
Shin
, “
Package-induced catastrophic mirror damage of 980-nm GaAs high-power laser
,”
Mater. Chem. Phys.
88
,
410
416
(
2004
).
21.
M.
Fukuda
and
K.
Takahei
, “
Optically enhanced oxidation of III-V compound semiconductors
,”
J. Appl. Phys.
57
,
129
(
1985
).
22.
T.
Schoedl
,
U. T.
Schwarz
,
V.
Kummler
,
M.
Furitsch
,
A.
Leber
,
A.
Miller
,
A.
Lell
, and
V.
Harle
, “
Facet degradation of GaN heterostructure laser diodes
,”
J. Appl. Phys.
97
,
123102
(
2005
).
23.
L.
Marona
,
P.
Wisniewski
,
M.
Wzorek
,
J. S.
Koziorowska
,
S.
Grzanka
,
A. B.
Cieslinska
,
D.
Schiavon
,
S.
Stanczyk
,
A.
Czerwinski
,
T.
Czyszanowski
, and
P.
Perlin
, “
Surface photochemical corrosion as a mechanism for fast degradation of InGaN UV laser diodes
,”
ACS Appl. Mater. Interfaces
12
,
52089
52094
(
2020
).
24.
L.
Gao
,
F.
Lemarchand
, and
M.
Lequime
, “
Exploitation of multiple incidences spectrometric measurements for thin film reverse engineering
,”
Opt. Express
20
,
15734
15751
(
2012
).
25.
M.
Landmann
,
E.
Rauls
,
W. G.
Schmidt
,
M. D.
Neumann
,
E.
Speiser
, and
N.
Esser
, “
GaN m-plane: Atomic structure, surface bands, and optical response
,”
Phys. Rev. B
91
,
035302
(
2015
).
You do not currently have access to this content.