We investigated the cavity facet degradation of unsealed GaN-based laser diodes (LDs). It was found that the decrease of optical output power accompanied by undulation for unsealed LDs is related to the facet degradation. Deposits containing Ga, Al, Si, and O were observed on the LD facet for the first time, explaining the reason for the degradation behavior. Considering the shorter wavelength of GaN-based laser diodes, we propose that the splitting of water molecules induced by high-energy photons triggers the oxidation of the facets and the deposition of SiO2. The shape of the deposits is closely correlated with the field distribution on the facet, influencing the LDs’ output power. Improving the tightness of the package is necessary to avoid the fast degradation of GaN-based LDs.
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14 June 2021
Research Article|
June 10 2021
New mechanisms of cavity facet degradation for GaN-based laser diodes
Xiao-Wei Wang
;
Xiao-Wei Wang
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
2
College of Materials Science and Optoelectronics Technology, University of Chinese Academy of Sciences
, Beijing 100049, China
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Zong-Shun Liu;
Zong-Shun Liu
a)
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
a)Authors to whom correspondence should be addressed: zsliu@red.semi.ac.cn and dgzhao@red.semi.ac.cn
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De-Gang Zhao
;
De-Gang Zhao
a)
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
3
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences
, Beijing 100049, China
a)Authors to whom correspondence should be addressed: zsliu@red.semi.ac.cn and dgzhao@red.semi.ac.cn
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Ping Chen;
Ping Chen
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
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Feng Liang
;
Feng Liang
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
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Jing Yang
Jing Yang
1
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences
, Beijing 100083, China
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a)Authors to whom correspondence should be addressed: zsliu@red.semi.ac.cn and dgzhao@red.semi.ac.cn
J. Appl. Phys. 129, 223106 (2021)
Article history
Received:
March 22 2021
Accepted:
May 22 2021
Citation
Xiao-Wei Wang, Zong-Shun Liu, De-Gang Zhao, Ping Chen, Feng Liang, Jing Yang; New mechanisms of cavity facet degradation for GaN-based laser diodes. J. Appl. Phys. 14 June 2021; 129 (22): 223106. https://doi.org/10.1063/5.0051126
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